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Si Cathode 개발을 위한 연삭 및 폴리싱 가공특성
채승수(Seung-Su Chae),이충석(Choong-Seok Lee),김택수(Taeck-Su Kim),이상민(Sang-Min Lee),허찬(Chan Huh),이종찬(Jong-Chan Lee) 한국기계가공학회 2010 한국기계가공학회지 Vol.9 No.2
This paper reports some experimental result in grinding and polishing of silicon cathodes used in semiconductor manufacturing process. Cup shape diamond core wheels were used in experiments and the radial and tangential grinding forces were measured with surface roughness. In polishing experiments, flat type and donut type wool polishing tools were tested. The experimental results indicate that the grinding forces are proportional to the material removal rates and the surface roughness are inversely proportional to the spindle speed. The surface roughness of polished Si decreases with polishing time and higher spindle speed.
채승수(Seung-Su Chae),이상민(Sang-Min Lee),박휘근(Hwi-Keun Park),조준현(Jun-Hyun Cho),이종찬(Jong-Chan Lee),허찬(Chan Heo) 한국기계가공학회 2013 한국기계가공학회지 Vol.12 No.2
Cathode is an essential component used in plasma etching process which is to make micro pattern on the silicon wafer. The currently used cathodes produce particles at the high temperature plasma etching process. To overcome this problem, a ‘Silicon Only Cathode’ was developed. This ‘Silicon Only Cathode’ requires manufacturing process changes due to the change of shapes, material features, and machining characteristics of work materials. This research investigates the small hole drilling process. The conclusion is that PCD drills with twist angles of 20? and 25? were tested for small hole drilling and the experimental results indicate that the drill with 25? twist angle drill causes less thrust force.
Cross Hole Type 비 연삭 밀링 인서트의 마모에 대한 연구
김택수(Taek-Su Kim),이상민(Sang-Min Lee),박휘근(Hwi-Keun Park),채승수(Seung-Su Chae),이충석(Choong-Seok Lee),김영흠(Yeong-Heum Kim),성욱중(Uk-Jung Seong),남기찬(Gi-Chan Nam),이종찬(Jong-Chan Lee) 한국기계가공학회 2008 한국기계가공학회 춘추계학술대회 논문집 Vol.2008 No.-
This paper reports some experimental results on the tool wears of non-ground cross hole type milling inserts. Six kinds of milling inserts were manufactured without using grinding process. Machining experiments were carried out to compare the tool wears of non-ground inserts with that of ground ones. The experimental results indicate that the tool wears of both ground and non-ground inserts are comparable.
이충석(Choong-Seok Lee),채승수(Seung-Su Chae),박세진(Se-Jin Park),김종표(Jong-Pyo Kim),오중표(Joong-Pyo Oh),이종찬(Jong-Chan Lee) 한국기계가공학회 2006 한국기계가공학회 춘추계학술대회 논문집 Vol.2006 No.-
This study reports the grinding characteristics of silicon carbide (SiC) using diamond grinding wheel. Grinding experiments were performed at various grinding conditions including grinding directions(up grinding, down grinding), table speeds and depth of cuts. The grinding forces at various table speed and depth of cut were measured under fixed material removal rate. The surface roughnesses at various table speed and depth of cut were obtained. The experimental results show that the grinding forces were lower at the higher table speed and lower depth of cut under same material removal rate. The surface roughnesses were worse at the higher table speed, but it was not related with depth of cut.
이상민(Sang-Min Lee),채승수(Seung-Su Chae),이재건(Jae-Kun Lee),최환(Hwan Choi),이종찬(Jong-Chan Lee) 한국기계가공학회 2014 한국기계가공학회지 Vol.13 No.2
Skull Melted 3.2YSZ has good physical properties and does not undergo low temperature degradation. Due to these excellent physical and mechanical properties, Skull Melted 3.2YSZ has been studied for use in dental implants. In this study, a ø2.2mm Initial Twist Drill was made usingSkull Melted 3.2YSZ; the drilling characteristics were compared with those of the traditional SUS420J drill. The experimental results indicate that the Skull Melted 3.2YSZ drill requires similar thrust forces and has a slightly higher temperature.
원통연삭시 연삭휠의 종류에 따른 연삭 가공특성에 관한 연구
이충석(Choong-Seok Lee),채승수(Seung-Su Chae),김택수(Taeck-Su Kim),이상민(Sang-Min Lee),박휘근(Hwi-Keun Park),이종찬(Jong-Chan Lee) 한국기계가공학회 2008 한국기계가공학회지 Vol.7 No.1
This paper reports some experimental results of cylindrical external grinding using CBN wheels. Many experimental studies for surface grinding have been done, but not for the cylindrical grinding due to the difficulty of grinding force measurement. In this paper a new experimental device has been proposed for the grinding force measurement in cylindrical grinding. The cylindrical grinding experiments were carried out at various grinding conditions with several CBN grinding wheels. The experimental results indicate that the CBN wheels with smaller grains result in the higher grinding forces in both SCM415 and STD11 workpieces. The grinding forces of all wheels were proportional to the infeed speeds and the difference of each wheels was prominent at high infeed speed for SCM415.
초음파를 이용한 CVD-SiC 미세 홀 가공기술에 관한 연구
허찬(Chan Hur),채승수(Seung-Su Chae),이충석(Choong-Seok Lee),김택수(Taeck-Soo Kim),이종찬(Jong-Chan Lee) 한국기계가공학회 2007 한국기계가공학회 춘추계학술대회 논문집 Vol.2007 No.-
The ultra-sonic technology has been developed along with development of the IT industry that needs precision parts in semiconductors, aerospac, PDP, LCD and automobile. The application of ultra-sonic vibration is one of the most useful solution in dealing with problems of chipping and cracks during the machining of brittle and difficult-to-cut materials. This study is about machining technology of micro drilling for CVD-SiC using ultra-sonic machining. The experiments of the ultra-sonic machining, in which abrasive particles in slurry with water are presented to the work surface in the presence of an ultra-sonic vibrating tool, were carried out under various normal forces from 5N to 20N. The experimental results show that the ultra-sonic machining technology can be effectively utilized in micro drilling of CVD-SiC
임플란트 시술용 지르코니아 소재의 연삭가공 성능 평가에 관한 연구
이상민(Sang-Min Lee),채승수(Seung-Su Chae),이충석(Choong-Seok Lee),김택수(Tack-Su Kim),이재건(Jae-Kun Lee),이종찬(Jong-Chan Lee) 한국기계가공학회 2014 한국기계가공학회지 Vol.13 No.1
3.2YSZ melted by the ‘skull melting’ method has good physical properties and does not undergo low-temperature degradation. Due to its excellent physical and mechanical properties, skull-melted 3.2YSZ has been developed as a dental implant material. In this study, a porous, resin-bonded diamond wheel was created and its grinding characteristics were compared with those of traditional nonporous wheels using skull-melted 3.2YSZ. The experimental results indicate that the porous, resin-bonded diamond wheel requires less grinding force and power. In addition, the porous, resin-bonded diamond wheel requires a greater degree of roughness.
Resin-Bonded Diamond Wheel의 기공 유ㆍ무에 따른 연삭저항력 평가에 관한 연구
이상민(Sang-Min Lee),채승수(Seung-Su Chae),이충석(Choong-Seok Lee),김택수(Taeck-Su Kim),이종찬(Jong-Chan Lee),오중표(Joong-Pyo Oh) 한국기계가공학회 2007 한국기계가공학회 춘추계학술대회 논문집 Vol.2007 No.-
The resin bonded diamond wheel is used to grind the difficult-to-cut materials. Traditionally, the resin bonded diamond wheel is manufactured without any pores due to the characteristics of resin bond. In this study, two porous resin bonded diamond wheel were made and the grinding characteristics were compared with traditional nonporous ones. The experimental results indicate that the porous resin bond diamond wheel require less grinding forces and powers.
STN LCD Glass용 Polishing Pad에 관한 연구
박세진(Se-Jin Park),이승현(Seung-Hyun Lee),채승수(Seung-Su Chae),이충석(Choong-Seok Lee),김종표(Jong-Poy Kim),이종찬(Jong-Chan Lee) 한국기계가공학회 2006 한국기계가공학회 춘추계학술대회 논문집 Vol.2006 No.-
This paper reports some experimental results on the polishing of STN LCD Glass. Three types of polishing pads were made at different hardness and density. These pads were tested at oscar type single side polishing machine. The experimental results show that the polishing pad with higher density and hardness results in higher removal rate, but poor waviness.