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정현석,이병근,남호수,주철민 東西大學校 1999 동서논문집 Vol.5 No.-
This research presents a useful method of managing the quality document. In order to manage the quality document, managers have to experience a lot of trouble. To overcome this problem, we use the concept of Hyper Text in HANGUEL software, which is a kind of word processor . We can confirm that the effect of this simple challenge is valuable in the field work.
HNO3 : H2O2 : HF 세척법을 이용한 실리콘 직접 접합 기술에 관한 특성 연구
이종석,성만영,최우범,주철민,이정훈 고려대학교 공학기술연구소 1999 공학논문집 Vol.37 No.1
We have studied the method of silicon direct bonding using the mixture of HNO₃, H₂O₂ and HF chemicals called the controlled slight etch (CSE) solution for the effective wafer cleaning. CSE, two combinations of oxidizing and etching agents, have been used to clean the silicon surfaces prior to wafer bonding. Two wafers of silicon and silicon dioxide were contacted each other at room temperature and post-annealed at 300∼1100℃ in N₂ ambient for 2.5 hour. We have cleaned silicon wafers with the various HF concentrations and characterized the parameters with regard to surface roughness, chemical nature, chemical oxide thickness, and bonding energy. It was observed that the chemical oxide thickness of the silicon wafer decreased with increasing HF concentrations. The initial interfacial energy and final energy post-annealed at 1100℃ for 2.5 hour measured by the crack propagation method was 122 mJ/㎡ and 2.96 J/㎡ , respectively.