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전기영동법에 의한 Al_2O_3 후막 특성에 관한 연구
주상현,전용우,소대화 명지대학교 대학원 1997 대학원논문집 Vol.1 No.-
In this experiment, Al_2O_3 thick films were prepared by electrophoretic method using Al_2O_3 fine powder of which compositions were FA-5-500 and FA-5-900. As a result of measurement for Al_2O_3 thick film characteristics due to applied voltage and deposition time, deposited films which was prepared with 65 volts of applied voltage and 2 seconds of deposition time exhibited superior than others.
현탄액 조성에 따른 Al₂O₃ 후막의 제조조건에 관한 연구
주상현,조용준,소대화 明知大學校 産業技術硏究所 1998 産業技術硏究所論文集 Vol.17 No.-
In this paper, to obtained good Al₂O₃insulating thick film by electrophoretic method, we used Al₂O₃fine powder(FA-5-500, FA-5-900) and AlF₃, CaF₃ with additivties. As a result of comparison and measurement for elecrophoretic deposition thick film charateristics due to applied voltage, deposition time between pure Al₂O₃thick film and added aditivities, deposited film which was prepared with additivities was superior to pure film. When taken a heat treatment and sintered Al₂O₃deposition film made by electrophoresis with Al₂O₃suspension medium at 1700℃ for 5 minutes in hydroren atmosphere, it could be fabricated in good uniformity and electric characterristics as the Al₂O₃insulating thick films. .