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전기영동법에 의한 Al_2O_3 후막 특성에 관한 연구
주상현,전용우,소대화 명지대학교 대학원 1997 대학원논문집 Vol.1 No.-
In this experiment, Al_2O_3 thick films were prepared by electrophoretic method using Al_2O_3 fine powder of which compositions were FA-5-500 and FA-5-900. As a result of measurement for Al_2O_3 thick film characteristics due to applied voltage and deposition time, deposited films which was prepared with 65 volts of applied voltage and 2 seconds of deposition time exhibited superior than others.