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Development of a MEMS-based H2S sensor with a high detection performance and fast response time
정동건,정대웅,이준엽,정동혁,이원오,박병서 한국센서학회 2023 센서학회지 Vol.32 No.4
H2S is a toxic and harmful gas, even at concentrations as low as hundreds of parts per million; thus, developing an H2S sensor with excellent performance in terms of high response, good selectivity, and fast response time is important. In this study, an H2S sensor with a high response and fast response time, consisting of a sensing material (SnO2), an electrode, a temperature sensor, and a micro-heater, was developed using micro-electro-mechanical system technology. The developed H2S sensor with a micro-heater (circular type) has excellent H2S detection performance at low H2S concentrations (0–10 ppm), with quick response time (<16 s) and recovery time (<65 s). Therefore, we expect that the developed H2S sensor will be considered a promising candidate for protecting workers and the general population and for responding to tightened regulations.
열처리 효과에 따른 SnO2 기반 수소가스 센서의 특성 최적화
정동건,정대웅,이준엽,권진범,맹보희,김영삼,양이준 한국센서학회 2022 센서학회지 Vol.31 No.5
Hydrogen gas (H2) which is odorless, colorless is attracting attention as a renewable energy source in varions applications but its leakage can lead to disastrous disasters, such as inflammable, explosive, and narcotic disasters at high concentrations. Therefore, it is necessary to develop H2 gas sensor with high performance. In this paper, we confirmed that H2 gas detection ability of SnO2 based H2 gas sensor along with thermal treatment effect of SnO2. Proposed SnO2 based H2 gas sensor is fabricated by MEMS technologies such as photolithgraphy, sputtering and lift-off process, etc. Deposited SnO2 thin films are thermally treated in various thermal treatement temperature in range of 500–900oC and their H2 gas detection ability is estimatied by measuring output current of H2 gas sensor. Based on experimental results, fabricated H2 gas sensor with SnO2 thin film which is thermally treated at 700oC has a superior H2 gas detection ability, and it can be expected to utilize at the practical applications.
DRE 공정이 태양전지용 재생웨이퍼 특성에 미치는 영향
정동건,공대영,윤성호,서창택,이윤호,조찬섭,김봉환,배영호,이종현,Jung, D.G.,Kong, D.Y.,Yun, S.H.,Seo, C.T.,Lee, Y.H.,Cho, C.S.,Kim, B.H.,Bae, Y.H.,Lee, J.H. 한국진공학회 2011 Applied Science and Convergence Technology Vol.20 No.3
최근, 결정질 실리콘 태양전지 분야에서 저가격화와 공정의 단순화가 가장 중요한 부분으로 대두되고 있다. 특히 태양전지 가격의 대부분을 차지하고 있는 웨이퍼의 저가격화가 가장 큰 이슈로 떠오르면서, 웨이퍼의 저가격화를 실현하기 위한 최선의 방안으로 마이크로 블라스터를 이용한 재생웨이퍼 제작 방법이 대두되고 있다. 마이크로 블라스터를 이용하여 재생웨이퍼를 제작 할 경우, 표면의 요철이 형성되어 반사율이 감소되어 태양전지 내부로 입사하는 빛의 양을 증가시키는 긍정적인 효과가 있다. 또한, 공정비용이 저렴하여 태양전지 저가격화를 실현할 수 있다. 그러나, 마이크로 블라스터를 이용한 공정은 웨이퍼에 물리적인 충격을 주기 때문에 표면에 크랙이 형성되며 식각 잔여물들이 표면에 재흡착되는 단점이 있다. 본 연구에서는 이러한 단점들을 보완하기 위하여 DRE (Damage Remove Etching)를 수행하였다. DRE 공정 후 반사율과 소수 반송자 수명을 측정하여 미세 파티클과 마이크로 크랙의 제거를 확인하였고, 태양전지를 제작하여 효율에 미치는 영향을 분석하였다. 마이크로 블라스터 공정 후 웨이퍼의 소수 반송자 수명은 Bare 웨이퍼에 비해 80% 정도 감소하였으나, DRE 공정 수행 후에는 50% 까지 증가하였음을 확인할 수 있었다. 태양전지 효율을 비교해보면, DRE 공정을 수행한 웨이퍼의 경우 Bare 웨이퍼보다 약 1~2%, DRE 공정을 수행하지 않은 웨이퍼보다 약 3∼5% 증가했음을 확인하였다. of materials and simplification of process. Micro-blasting is one of the promising method for recycling of waste wafer due to their simple and low cost process. Therefore, in this paper, we make recycling wafer through the micro-blaster. A surface etched by micro-blaster forms particles, cracks and pyramid structure. A pyramid structure formed by micro-blaster has a advantage of reflectivity decrease. However, lifetime of minority carrier is decreased by particles and cracks. In order to solve this problems, we carried out the DRE(Damage Romove Etching). There are two ways to DRE process ; wet etching, dry etching. After the DRE process, we measured reflectivity and lifetime of minority carrier. Through these results, we confirmed that a wafer recycled can be used in solar cell.
식물추출물의 단독 및 혼합 처리에 대한 차응애의 토착 포식성 천적 긴털이리응애의 감수성 검정
정동건,국용인,현규환,김상수 한국차학회 2019 한국차학회지 Vol.25 No.1
주엽, 차나무, 계피, 란타나 등의 추출물과 이들의 혼합물들에 대한 차응애의 포식성 천적인 긴털이리응애의 감수성을 검정하였다. 긴털이리응애 암컷 성충은 실험 식물추출물들의 처리 7일 후에 72∼94%의 생존율을 나타냈으며, 무처리 암컷 성충에 비해 68.1∼94.5%의 산란수를 보였고 산란된 난들의 부화에 영향이 없었다. 실험 식물추출물들의 처리는 긴털이리응애 난의 부화에 대해 별 영향이 없었다. 또한 이들 식물추출물의 처리는 약충의 생존율에도 큰 영향이 없었다. 이상의 결과로 보아, 실험 식물추출물들은 차응애의 종합관리 체계에서 긴털이리응애와 함께 활용할 수 있을 것으로 생각된다. The susceptibility of Neoseiulus womersleyi, a native predaor of Tetranychus kanzawai, to extracts of Gleditsia japonica var. koraiensis, Camellia sinensis, Cinnamomum cassia, Lantana camara and their mixtures was evaluated. In the treatments with the tested plant extracts, 72∼94% of adult female predators survived after 7 days of treatment. Adult female predators treated with the tested plant extracts produced 68.1∼94.5% as many eggs as did the control females, and the hatching of eggs deposited by the treated predators was not affected. Moreover, the treatments of the plant extracts tested showed no significant effect on the hatch of N. womersleyi eggs. The survival of N. womersleyi nymphs was not seriously affected by being exposed to the tested plant extracts. These results suggest that the extracts of Gleditsia japonica var. koraiensis, Camellia sinensis, Cinnamomum cassia, Lantana camara, and their mixtures expected to be promising candidates for the use in the integrated mite management program with N. womersleyi.
저온 공정을 통해 제작이 가능한 Sn/SWNT 혼합 파우더 기반의 TSV구조 개발
정동건,공성호,정대웅 한국센서학회 2019 센서학회지 Vol.28 No.2
In this study, the fabrication of through-silicon vias (TSVs) filled with SWNTs/Sn by utilizing surface/bulk micromachining and MEMS technologies is proposed. Tin (Sn) and single-walled nanotube (SWNT) powders are used as TSV interconnector materials in the development of a novel TSV at low temperature. The measured resistance of a TSV filled with SWNT/Sn powder is considerably reduced by increasing the fraction of Sn and is lower than that of a TSV filled with only Sn. This is because of a decrease in the surface scattering of electrons along with an increase in the grain size of sintered SWNTs/Sn. The proposed method is conducted at low temperatures (<400 °С) due to the low melting temperature of Sn; hence, the proposed TSVs filled with SWNTs/Sn can be utilized in CMOS based applications.
부영양화 사전 예방을 위한 휴대용 총인 모니터링 시스템 개발
정동건 ( Dong Geon Jung ),김승덕 ( Seung Deok Kim ),권순열 ( Soon Yeol Kwon ),이재용 ( Jae Yong Lee ),김유성 ( Yu Seong Kim ),이준엽 ( Junyeop Lee ),김재건 ( Jaekeon Kim ),김세완 ( Sae-wan Kim ),공성호 ( Seong Ho Kong ),정대웅 ( D 한국센서학회 2020 센서학회지 Vol.29 No.5
In this study, a portable total-phosphorus (TP) monitoring system utilizing a photocatalytic-reaction-based pretreatment method is proposed, fabricated, and characterized. Commercial TP monitoring systems are only used in laboratories because of their complex monitoring procedure, bulk-size, and high-cost. In particular, pretreatment in commercial TP monitoring systems is performed at high temperatures (> 120 ℃) and pressure (> 1.1 kg cm<sup>-2</sup>) making it difficult to minimize the scale of the systems. The proposed TP monitoring system employs a pretreatment method with a photocatalytic reaction; thus, its size can be reduced, as photocatalytic reactions occur at room temperature and atmospheric pressure. Analytes with various TP concentrations are pretreated using the proposed portable TP monitoring system and are quantitatively measured with an LED and a photodiode.
광 도파관이 외부로 노출된 구조를 가지는 비분산적외선 이산화탄소 센서
정동건 ( Dong Geon Jung ),이준엽 ( Junyeop Lee ),도남곤 ( Nam Gon Do ),정대웅 ( Daewoong Jung ) 한국센서학회 2021 센서학회지 Vol.30 No.6
In this study, a Non-Dispersive Infrared (NDIR) Carbon Dioxide (CO<sub>2</sub>) sensor with an externally exposed optical cavity is proposed for improving sensitivity. NDIR CO<sub>2</sub> sensors with high performance must use a lamp-type infrared (IR) source with a strong IR intensity. However, a lamp-type IR source generates high thermal energy that induces thermal noise, interfering with the accuracy of the CO<sub>2</sub> concentration measure. To solve this problem, the optical cavity of the NDIR CO<sub>2</sub> sensor is exposed to quickly dissipate heat. As a result, the proposed NDIR CO<sub>2</sub> sensor has a shorter warm-up time and a higher sensitivity compared to the conventional NDIR CO<sub>2</sub> sensor.
용액공정을 이용한 열처리된 산화아연 박막의 투명한 박막 트랜지스터 구현을 위한 전사방법 개발
권순열,정동건,최영찬,이재용,공성호 한국반도체디스플레이기술학회 2018 반도체디스플레이기술학회지 Vol.17 No.2
Recently, Thin-film transistors (TFTs) are fundamental building blocks for state-of-the-art microelectronics, such as flat-panel displays and system-on-glass. Zinc oxide thin films have the advantage that they can grow at low temperature and can obtain high charge movility. Also the zinc oxide thin film can be used to control the resistance according to the oxygen content, so it is very easy to obtain the desired physical properties. In this paper, we fabricated a zinc oxide thin film on a polished copper substrate through a solution process, then improved the crystallinity through a geat treatment porcess, and studied to transfer it on a flexible substrate after the heat treatment was completed.