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증착 후 열처리온도에 따른 SnO2 박막의 수소 검출민감도 변화
유용주 ( Y Z You ),김선광 ( S K Kim ),이영진 ( Y J Lee ),허성보 ( S B Heo ),이학민 ( H M Lee ),김대일 ( Dae Il Kim ) 한국열처리공학회 2012 熱處理工學會誌 Vol.25 No.5
SnO2 thin films were prepared on the Si substrate by radio frequency (RF) magnetron sputtering and then post deposition vacuum annealed to investigate the effect of annealing temperature on the structural properties and hydrogen gas sensitivity of the films. The films that annealed at 300℃ show the higher sensitivity than the other films annealed at 150℃. From atomic force microscope observation, it is supposed that post deposition annealing promotes the rough surface and also, increase gas sensitivity of SnO2 films for hydrogen gas. These results suggest that the vacuum annealed SnO2 thin films at optimized temperatures are promising for practical high-performance hydrogen gas sensors.
허정(J. Huh),유용주(Y. Z. You) 한국열처리공학회 2002 熱處理工學會誌 Vol.15 No.3
BCl_3를 봉소의 공급원으로 하여 공구강의 표면에 PECVD 방식에 의해 TiBN 박막을 코팅하였다. TiBN박막의 미세조직은 TiN에 비해 상대적으로 치밀하여 Hv 5000이상의 고경도를 얻을 수 있었다. 박막의 경도와 밀착력은 BCl_3양에 따라 증가하여 41/h일 때 최대치를 나타냈는데 내마모성도 이 때가 가장 우수하였다. TiBN 코팅에 의해 금형의 수명을 크게 향상시킬 수 있었고 특히 다이캐스팅 금형에서 그 효과가 크게 나타났다. During warm and hot forging process of steels or aluminum alloys, dies are subject to earty fracture, severe wear by thermo-mechanical stress. Especially, during the die-casting of aluminum alloys, the service life of dies is incredibly lowered. In this study we investigated the characteristics of TiBN films produced by PECVD. TiBN films showed very high hardness, excellent wear resistance, which could enhance the service life of die parts such as forging punch, die casting core pin successfully.
SCM435 구조용 합금강의플라즈마 질화에 미치는 전처리 ( Q / T ) 의 영향
임영필,박대철,이재식,유용주 ( Young Phil Lim,Dae Chul Park,Jae Sig Lee,Yong Zoo You ) 한국열처리공학회 1998 熱處理工學會誌 Vol.11 No.2
N/A The effects of pre-heat treatment(Q/T) on microstructure and hardness of SCM435 structural steel nitrided by micro-pulse plasma was investigated. The quenching and tempering temperatures for obtaining matrix hardness of SCM435 steel on range of HRC30 to HRC40 desired for machine parts were about 860℃ and 500℃ respectively. The case depth of SCM435 nitrided at 480℃ for 5 hours was independent of pre-heat treatment condition and was approximately 150㎛. However, hardness and compactness of nitrified layer on Q/T treated specimen were more heigher than annealed specimen. The case depth increased linearly with the increase of nitriding temperature, however, the hardness of nitrified layer decreased with the temperature. Phase mixture of γ` -phase(Fe₄N) and ε-phase(Fe₃N) were detected by XRD analysis in the nitrified layer formed at optimum nitriding condition, and only single γ`-phase was detected in the nitrified layer formed at higher nitriding temperature such as 540℃. The optimum nitriding temperature was approximately 480℃ which is lower than tempering temperature for preventing softening behavior of SCM435 matrix during nitriding process and the surface hardness of nitrified layer obtained by optimum preheat treatment condition was about Hv930
공영민,이학민,허성보,김선광,유용주,김대일,Kong, Young-Min,Lee, Hak-Min,Huh, Sung-Bo,Kim, Sun-Kwang,You, Yong-Zoo,Kim, Dae-Il 한국재료학회 2010 한국재료학회지 Vol.20 No.12
ZnO thin films were prepared on a glass substrate by radio frequency (RF) magnetron sputtering without intentional substrate heating and then surfaces of the ZnO films were irradiated with intense electrons in vacuum condition to investigate the effect of electron bombardment on crystallization, surface roughness, morphology and hydrogen gas sensitivity. In XRD pattern, as deposited ZnO films show a higher ZnO (002) peak intensity. However, the peak intensity for ZnO (002) is decreased with increase of electron bombarding energy. Atomic force microscope images show that surface morphology is also dependent on electron bombarding energy. The surface roughness increases due to intense electron bombardment as high as 2.7 nm. The observed optical transmittance means that the films irradiated with intense electron beams at 900 eV show lower transmittance than the others due to their rough surfaces. In addition, ZnO films irradiated by the electron beam at 900 eV show higher hydrogen gas sensitivity than the films that were electron beam irradiated at 450 eV. From XRD pattern and atomic force microscope observations, it is supposed that intense electron bombardment promotes a rough surface due to the intense bombardments and increased gas sensitivity of ZnO films for hydrogen gas. These results suggest that ZnO films irradiated with intense electron beams are promising for practical high performance hydrogen gas sensors.
증착조건과 진공열처리 온도에 따른 ITO/PES 박막의 특성 연구
이재영,박지혜,김유성,천희곤,유용주,김대일,Lee, Jae-Young,Park, Ji-Hye,Kim, Yu-Sung,Chun, Hui-Gon,You, Yong-Zoo,Kim, Dae-Il 한국재료학회 2007 한국재료학회지 Vol.17 No.4
Transparent conducting indium tin oxide (ITO) films were deposited onto the Polyethersulfone (PES) substrate by using a magnetron sputter type negative metal ion source. In order to investigate the influence of cesium (Cs) partial pressure during deposition and annealing temperature on the optoelectrical properties of ITO/PES film the films were deposited under different Cs partial pressures and post deposition annealed under different annealing temperature from $100^{\circ}C$ to $170^{\circ}C$ for 20 min at $3\;{\times}\;10^{-1}$ Pa. Optoeleetrical properties of ITO films deposited without intentional substrate heating was influenced strongly by the Cs partial pressure and the Cs partial pressure of $1.5\;{\times}\;10^{-3}$ Pa was characterized as an optimal Cs flow condition. By increasing post-deposition vacuum annealing temperature both optical transmission in visible light region and electrical conductivity of ITO films were increased. Atomic force microscopy (AFM) micrographs showed that the surface roughness also varied with post-deposition vacuum annealing temperature.
GCD 45 중심부 조직 및 기계적 성질에 미치는 ADI 열처리 조건의 영향
김한군(H . G . Kim),유용주(Y . Z . You),이재식(J . S . Lee),정태영(T . Y . Chung) 한국열처리공학회 2002 熱處理工學會誌 Vol.15 No.1
N/A The effect of ADI heat treatment conditions on the core microstructures and mechanical properties of GCD 45 has been investigated. In the case of 25βÆ in diameter, it has been found that pearlite structure is not obtained, and the matrix is consisted of graphite, bainite and retained austenite. Upon cooling isothermally from 900℃, the core structure of 35 mm in diameter is converted to pearlite. However, the structure is transformed to bainite after slow cooling from 900℃ to 800℃.
이재식(J . S . Lee),김한군(H . G . Kim),유용주(Y . Z . You) 한국열처리공학회 2001 熱處理工學會誌 Vol.14 No.1
N/A The effects of pre-heat treatment(Q/T) on microstructure and hardness of STD11 and STD61 tool steel nitrided by micro-pulse plasma were investigated. The quenching temperature for obtaining matrix hardness of STD11 and STD61 steel on range of HRC 50 to HRC 60 desired for machine parts is about 1070℃ and 1020℃ respectively. The hardness of STD11 and STD61 quenched at the temperature was HRC 63 and HRC 56 respectively. The nitrided case depth of STD11 and STD61 nitrided at 550℃ for 5 hours was independent of pre-heat treatment condition and the depth was approximately 100㎛. However, hardness and compactness of nitrided layer on Q/T treated specimen were higher than the annealed specimen. The case depth increased linearly with the increase of nitriding temperature, however, the hardness of nitrided layer decreased with the increase of temperature. Phase mixture of Υ-Fe4N and ε-Fe_(2-3)N was detected by XRD analysis in the nitrided layer formed at the optimum nitriding condition. The optimum nitriding temperature was approximately 490℃ which was 10℃ lower than the tempering temperature for preventing softening behavior of STD11 and STD61 matrix during nitriding process and the surface hardness of nitrided layer obtained by optimum pre-heat treatment condition was about Hv1400.
금형공구강의 후산화와 침류질화에 의해 형성된 복합층의 조직과 특성에 관한 연구
이재식(J . S . Lee),김한군(H . G . Kim),유용주(Y . Z . You) 한국열처리공학회 2001 熱處理工學會誌 Vol.14 No.2
N/A The effects of post-oxidation and sulfnitriding treatments on the phase transformation in the nitrided case of tool steels have been studied. Dense and compact Fe₃O₄layer was formed at the outer surface of nitride compound layer by post-oxidation treatment and multi layer of iron sulfide(FeS) was formed in the compound layer by sulfnitriding treatment. The surface hardness decreased because of formation of the soft oxide or sulfide at the nitride surface. Diffusion layer of nitride case was not affected by post-oxidation treatment or sulfnitriding treatment of nitrided alloy tool steels.
허성보 ( S B Heo ),이영진 ( Y J Lee ),김선광 ( S K Kim ),유용주 ( Y Z You ),최대한 ( D H Choi ),이병훈 ( B H Lee ),김민규 ( M G Kim ),김대일 ( Daeil Kim ) 한국열처리공학회 2012 熱處理工學會誌 Vol.25 No.6
SnO₂ thin films were prepared on the Si substrate by radio frequency magnetron sputtering and then surface of the films were irradiated with intense Ar ion beam to investigate the effect of Ar ion irradiation on the properties and hydrogen gas sensitivity of the films. From atomic force microscope observation it is sup-posed that intense Ar bombardments promote rough surface and increase gas sensitivity of SnO₂ films for hydro-gen gas. The films that Ar ion beam irradiated at 6 keV show the higher sensitivity than the films were irradiated at 3 keV and 9keV. These results suggest that the SnO₂ thin films irradiated with optimized Ar ion beam are promising for practical high-performance hydrogen gas sensors.