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RF 스퍼터와 전자빔 조사를 이용한 ITO/Au/ITO 가스센서 제조 및 특성 평가
허성보 ( Sung Bo Heo ),이학민 ( Hak Min Lee ),( Young Jin Lee ),김유성 ( Yu Sung Kim ),채주현 ( Ju Hyun Chae ),유용주 ( Yong Zoo You ),김대일 ( Dae Il Kim ) 한국열처리공학회 2011 熱處理工學會誌 Vol.24 No.2
Single layer Sn doped In2O3(ITO) films and ITO 50 nm/Au 10 nm/ITO 40 nm (IAI) multilayer films were prepared with electron beam assisted magnetron sputtering on glass substrates. The effects of the Au interlayer, post-deposition atmosphere annealing and intense electron irradiation on the methanol gas sensitivity were investigated at room temperature. As deposited ITO films did not show any diffraction peaks in the XRD pattern, while the IAI films showed the diffraction peak for In2O3 (400). In this study, the gas sensitivity of ITO and IAI films increased proportionally with the methanol vapor concentration and an intense electron beam irradiated IAI film shows the higher sensitivity than the others film. From the XRD pattern, it is supposed that increased crystallization promotes the gas sensitivity. This approach is promising in gaining improvement in the performance of IAI gas sensors used for the detection of methanol vapor at room temperature.
초고경도 Ti–Al–Si–N 나노복합체 코팅막의 미세구조 및 트라이볼로지 거동에 관한 연구
허성보(Sung-Bo Heo),김왕렬(Wang Ryeol Kim) 한국표면공학회 2021 한국표면공학회지 Vol.54 No.5
In this study, the influence of silicon contents on the microstructure, mechanical and tribological properties of Ti–Al–Si–N coatings were systematically investigated for application of cutting tools. The composition of the Ti–Al–Si–N coatings were controlled by different combinations of TiAl₂ and Ti₄Si composite target powers using an arc ion plating technique in a reactive gas mixture of high purity Ar and N₂ during depositions. Ti–Al–Si–N films were nanocomposite consisting of nanosized (Ti,Al,Si)N crystallites embedded in an amorphous Si₃N₄/SiO₂ matrix. The instrumental analyses revealed that the synthesized Ti–Al–Si–N film with Si content of 5.63 at.% was a nanocomposites consisting of nano-sized crystallites (5–7 nm in dia.) and a three dimensional thin layer of amorphous Si₃N₄ phase. The hardness of the Ti–Al–Si–N coatings also exhibited the maximum hardness value of about 47 GPa at a silicon content of ~5.63 at.% due to the microstructural change to a nanocomposite as well as the solid-solution hardening. The coating has a low friction coefficient of 0.55 at room temperature against an Inconel alloy ball. These excellent mechanical and tribological properties of the Ti–Al–Si–N coatings could help to improve the performance of machining and cutting tool applications.
허성보 ( Sung Bo Heo ),김소영 ( So Young Kim ),김승홍 ( Seung Hong Kim ),김선경 ( Sun Kyung Kim ),김유섬 ( Yu Sung Kim ),김대일 ( Dae Ii Kim ) 한국열처리공학회 2013 熱處理工學會誌 Vol.26 No.2
Abstrart ITO thin films deposited on glass substrate with RF magnetron sputtenng were vacuum annealed at 100, 200 and 300°C for 30 minutes and then effect of annealing temperature on the structural, electrical and optical properties of ITO films were investigated. The structural properties are strongly related to annealing temperature. The annealed films above 100°C are grown as a hexagonal wurtzite phase and the largest grain size is observed in the films annealed at 300°C. The electrical resistivity also decreases as low as 4.65 x I 0 0cm with a increase in annealing temperature and ITO film annealed at 300°C shows the lowest sheet resistance of 43.6 01 fl. The optical transmittance in a visible wavelength region also depends on the annealing temperature. The films annealed at 300°C show higher transmittance of 80.6% than those of the films prepared in this study.