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유경훈,Yoo, Kyung-Hoon 대한기계학회 2002 大韓機械學會論文集B Vol.26 No.12
Numerical analysis was conducted to characterize the gas flow field and particle deposition on a horizontal freestanding semiconductor wafer under the laminar flow field at vacuum environment. In order to calculate the properties of gas, the gas was assumed to obey the ideal gas law. The particle transport mechanisms considered were convection, Brownian diffusion and gravitational settling. The averaged particle deposition velocities and their radial distributions fnr the upper surface of the wafer were calculated from the particle concentration equation in an Eulerian frame of reference for system pressures of 1 mbar~1 atm and particle sizes of 2nm~10$^4$ nm(10 ${\mu}{\textrm}{m}$). It was observed that as the system pressure decreases, the boundary layer of gas flow becomes thicker and the deposition velocities are increased over the whole range of particle size. One thing to be noted here is that the deposition velocities are increased in the diffusion dominant particle size range with decreasing system pressure, whereas the thickness of the boundary layer is larger. This contradiction is attributed to the increase of particle mechanical mobility and the consequent increase of Brownian diffusion with decreasing the system pressure. The present numerical results showed good agreement with the results of the approximate model and the available experimental data.
유경훈(Kyung-Hoon Yoo),여국현(Kuk-Hyun Yeo),손승우(Seung-Woo Son),황광호(Kwang-Ho Hwang),정진원(Jin-Won Jung),김윤신(Yoon-Shin Kim) 대한기계학회 2004 대한기계학회 춘추학술대회 Vol.2004 No.4
DOS and NaCl aerosol particles with geometric mean diameter of 0.1~3.0 ㎛, geometric standard deviation of 1.1~1.8 and total number concentration of 450 ~ 400 particles/cm³ were used to determine collection efficiencies of a duct-type wet scrubber with respect to particle size. The tested operating variables included air velocity and water injection rate. It was shown from the experimental results that the collection efficiencies increased with increasing water injection rate and decreasing air velocity. It was also seen that the collection efficiency of the Duct-type wet scrubber is mainly governed by the mechanism of inertial impaction.
반도체 클린룸용 에어와셔의 수증기 응축에 의한 화학오염물 제거성능 개선 실험
유경훈(Kyung-Hoon Yoo),여국현(Kuk-Hyun Yeo),박상태(Sang-Tae Park),손승우(Seung-Woo Son) 대한기계학회 2006 대한기계학회 춘추학술대회 Vol.2006 No.6
In semiconductor manufacturing clean rooms, it becomes important to remove airborne molecular contaminants as well as particulate contaminant in outdoor air introduced into clean rooms. One suitable control technique for these chemical contaminants is air washing by water in an outdoor air handling unit. In order to enhance the removal efficiency of chemical contaminants the effect of adding a heating and humidifying process before an air washer was examined.
유경훈(Kyung-Hoon Yoo),여국현(Kuk-Hyun Yeo) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.5
In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants such as NH₃, SOx and organic gases from outdoor air introduced into clean room. Meanwhile, there is a large quantity of exhaust air from clean room. It is desirable to recover heat from exhaust air and use it to reheat outdoor air. In the present study, an experiment was conducted to investigate heat recovery efficiency of a heat recovery type air washer system.
유경훈(Kyung-Hoon Yoo),여국현(Kuk-Hyun Yeo),차호진(Ho-Jin Cha),김용우(Yong-Woo Kim),최동규(Dong-Kyu Choi),이홍규(Henry Lee) 한국실내환경학회 2006 한국실내환경학회지 Vol.3 No.2
In recent European telecommunication base transceiver stations(BTS), a membrane laminated air filter is reported to replace a heat exchanger in order to cool internal digital units of BTS. The concept of using the air filter is for the direct ambient cooling (DAC) of BTS without heat loss generally found in the heat exchanger type BTS. In the present study, a performance evaluation experiment was conducted to investigate the pressure drop characteristics with dust loading and the particle collection efficiency of the air filter for the DAC of BTS. Finally, the long term operation lifetime of the air filter for BTS was suggested with a given fan rotation speed.
실란가스를 이용한 가열되는 회전원판으로의 실리콘 박막 증착 해석
유경훈(Kyung-Hoon Yoo),송근수(Gun-Soo Song) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.5
Numerical analysis was conducted to simulate the reacting flow and heat transfer on a heated rotating disk during film deposition from silane gas. The effects of inlet and disk temperatures, disk rotation speed, and system pressure on silicondeposition rae were investigated. The inlet and disk temperatures are 300 K and 1000~1250 K, respectively. The range of rotation speed and system pressure covers 0~1000 rpm and 0.1~0.4 atm, respectively.
유경훈(Kyung-Hoon Yoo),여국현(Kuk-Hyun Yeo),박찬정(Chan-Jung Park),이재권(Jai-Kwon Lee),윤백(Baek Youn) 한국실내환경학회 2004 한국실내환경학회지 Vol.1 No.1
In order to develop combination air filters for air conditioners, 2 types of charging section were constructed. One was the wire-plate type and the other was the scroll type. Each charging section was combined with the same electrostatic polypropylene (PP) media. NaCl aerosol particles with geometric mean diameter of 0.05∼0.16㎛, geometric standard deviation of 1.6∼1.9 and total number concentration of 1,700∼24,000 particles/㎤ were used to determine collection efficiencies of the combination air filters for air conditioners with respect to particle size. It was shown that the scroll type combination air filter has greater collection efficiencies and lower pressure drops than the wire-plate type one does.