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Tris DMASi 소스를 이용한 SiON 제작 및 반사방지막 응용
연제민(Je-Min Yeon),강상준(Sang-Jun Kang),정상현(Sang-Hyun Jeong),찬타솜바스 시사바이(Chanthasombath Sisabay),김광호(Kwang-Ho Kim) 한국정보기술학회 2015 한국정보기술학회논문지 Vol.13 No.3
In the study, SiON film was deposited on silicon substrate with tris DMASi source, NH3 and mix gas without silane gas by plasma enhanced chemical vapor deposition(PECVD). SiON film was deposited by adjustment of gas ratio, working pressure, substrate temperature and RF power. And its reflective index and deposition rate were measured. Chemical composition ratio and electrical characteristics of SiON film was measured by XPS, C-V and I-V. Efficiency and Characteristic were compared solar cells of SiON/n+/p-Si(100) using tris DMASi source and SiNX/n+/p-Si(100). At the result SiON/n+/p-Si(100) solar cell by using tris DMASi source was measured similar 14.40% of efficiency and 0.90 of quantum efficiency with SiNX/n+/p-Si(100), SiON film can be fabricated and applied to anti-reflection coating.
오인영(In-Young Oh),전지준(Ji-Joon Jeon),김진범(Jin-Beom Kim),현진영(Jin-Yeong Hyeon),연제민(Je-Min Yeon),하현준(Hyun-Jun Ha),한성민(Seong-Min Han),강동건(Dong-Geon Kang),소위영(Wi-Young So) 대한운동학회 2024 아시아 운동학 학술지 Vol.26 No.1
OBJECTIVES In the modern era, there is heightened interest in understanding energy expenditure during exercise. Consequently, wearable devices such as the Galaxy Watch and Apple Watch have emerged as pivotal tools for daily health monitoring, given their convenience and increasing popularity. This study aimed to compare the calculated energy expenditure derived from the graded exercise test with readings from Galaxy and Apple Watches during a 30-min exercise session among Korean university students. Through this, we anticipate offering both motivation and clear insights into energy expenditure, thereby potentially aiding in weight management strategies for contemporary individuals. METHODS This study involved 27 college students from Korea National University of Transportation in Chungcheongbuk-do, Korea. We utilized COSMED's exercise load respiratory gas analysis system (Quark- CPET, COSMED, Rome, Italy), along with the Galaxy Watch (Galaxy Watch 5, Samsung, Seoul, Korea) and the Apple Watch (Apple watch series 5, Apple, Cupertino, USA) for measurements. Energy expenditure was monitored in real-time every 5 min throughout the 30-min exercise session. For statistical evaluations, we employed a one-way analysis of variance. Subsequent post-tests utilized the Tukey post-hoc test and Pearson correlation, with a significance level set at p<0.05. RESULTS Initially, no statistically significant difference emerged between energy expenditure readings from the graded exercise test and those from the Galaxy Watch across all time intervals: 5, 10, 15, 20, 25, and 30 min (p>0.05). Conversely, a notable difference was observed when comparing energy expenditure data from the graded exercise test to that of the Apple Watch for time intervals of 10, 15, 20, 25, and 30 min (p>0.05), although the 5-min interval did not exhibit a significant difference (p>0.05). Furthermore, a robust positive correlation was evident between the energy expenditure values derived from the graded exercise test and those from both the Galaxy Watch (r=0.952, p<0.001) and the Apple Watch (r=0.917, p<0.001). CONCLUSIONS Both devices demonstrated high reliability in calculating energy expenditure. Notably, the Galaxy Watch exhibited a more precise calculation compared to the Apple Watch, with a relative reliability margin of 3.5% higher. For individuals, especially those struggling with obesity, precise wearable devices that accurately reflect energy consumption can significantly boost motivation for exercise. Consequently, this study lays a foundation for future advancements in energy expenditure measurement tools, emphasizing enhanced convenience, reliability, and mobility.
a-Si(n<SUP>+</SUP>)/p-Si(100) 구조에 있어서의 a-Si(n<SUP>+</SUP>)박막 Ohmic 특성 연구
민관홍(Kwan-Hong Min),유정재(Jeong-Jea Yu),정상현(Sang-Hyun Jeong),연제민(Je-Min Yeon),김광호(Kwang-Ho Kim) 한국정보기술학회 2014 한국정보기술학회논문지 Vol.12 No.3
In this study, a-Si(n<SUP>+</SUP>) thin film of a-Si(n<SUP>+</SUP>)/p-Si(100) heterojunction was analysed for ohmic contact properties. a-Si(n+) thin film was deposited on p-Si(100) substrate by RF magnetron sputtering with Si(n+, 0.001-0.005Ω·cm)target. To analysis the properties of a-Si(n<SUP>+</SUP>) thin film, a-Si(n+) was deposited on quartz substrate and conductivity property was measured by 4-point probe and structural property was analysed by XRD(X-Ray Diffraction). In order to improve contact resistance of metal-semiconductor interface, TiSix electrode of TLM(Transmission Line Model) pattern was formed. Electrode conductivity of Ag/TiSiX electrode annealed at various temperature of 800-950℃ and time of 2-10s were measured by 4-point probe. Ag/TiSiX/a-Si(n<SUP>+</SUP>)/p-Si(100) structure of TLM pattern was fabricated and a-Si(n<SUP>+</SUP>) ohmic properties of heterojunction a-Si(n<SUP>+</SUP>)/p-Si(100) was analysed by pA meter(HP 4140B).