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Femtosecond Laser Surface Structuring of Amorphous and Crystalline Silicon
이건준,오차환,윤종승,김은규,정현식,장진,손용덕,이영백 한국물리학회 2006 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.48 No.6
The surface structuring of amorphous and crystalline silicon was performed by using femtosecondlaser- induced phase transformations: i) amorphous-to-crystalline and ii) crystalline-to-amorphous. The amorphous silicon (a-Si) films were prepared on glass substrates by using plasma-enhanced chemical-vapor deposition. Two kinds of micropatterns were produced in the a-Si films: i) a twodimensional (2D) pattern (a word ‘q-Psi’) was produced by using the inverse Fourier transform of a computer-generated hologram, and ii) laser-induced gratings (LIGs) were made by means of two-beam interference of near-infrared femtosecond-laser pulses. By using micro-Raman spectroscopy, optical microscopy, scanning electron microscopy, and transmission electron microscopy, the femtosecond-laser pulses were found to induce a localized phase transformation from the amorphous to the crystalline phase, and the spatially-selected crystallization of a-Si was found to be responsible for the formation of patterns such as the LIG and the 2D pattern. Crystalline silicon (c-Si) with a SiO2 capping layer was also periodically modified by femtosecond holography. A micro- Raman study indicated that the LIG formation in c-Si could be ascribed to the spatially-selected amorphization of c-Si. The surface structuring of amorphous and crystalline silicon was performed by using femtosecondlaser-induced phase transformations: i) amorphous-to-crystalline and ii) crystalline-to-amorphous. The amorphous silicon (a-Si) films were prepared on glass substrates by using plasma-enhanced chemical-vapor deposition. Two kinds of micropatterns were produced in the a-Si films: i) a twodimensional (2D) pattern (a word ‘q-Psi’) was produced by using the inverse Fourier transform of a computer-generated hologram, and ii) laser-induced gratings (LIGs) were made by means of two-beam interference of near-infrared femtosecond-laser pulses. By using micro-Raman spectroscopy, optical microscopy, scanning electron microscopy, and transmission electron microscopy, the femtosecond-laser pulses were found to induce a localized phase transformation from the amorphous to the crystalline phase, and the spatially-selected crystallization of a-Si was found to be responsible for the formation of patterns such as the LIG and the 2D pattern. Crystalline silicon (c-Si) with a SiO2 capping layer was also periodically modified by femtosecond holography. A microRaman study indicated that the LIG formation in c-Si could be ascribed to the spatially-selected amorphization of c-Si.
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