http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
실리콘 빔이 실리콘 고무 멤브레인에 삽입된 빗살형 차압센서의 설계 및 제조
박정용(Jeong Yong Park),공성수(Sung Soo Kong),서창택(Chang Taeg Seo),신장규(Jang Kyoo Shin),고광락(Kwang Rak Koh),이종현(Jong Hyun Lee) 한국센서학회 2000 센서학회지 Vol.9 No.6
N/A A novel differential pressure sensor has been developed with silicon beams embedded in a silicone rubber membrane. The transducer is usable for most applications involving exposure to harsh media. A piezoresistive differential pressure sensor using silicone rubber membrane has been fabricated on the selectively diffused (100)-oriented n/n+/n silicon substrates by a unique silicon micro-machining technique using porous silicon etching. The pressure sensitivity is about 0.66 μV/mmHg and the non-linearity is less than 0.1%.
Silicone rubber 멤브레인을 이용한 압저항형 저차압센서의 개발
서창택,공성수,심준환,고광락,서현미,김영진,설철규,신장규,이종현 경북대학교 센서기술연구소 1998 센서技術學術大會論文集 Vol.9 No.1
A 4-beam piezoresistive differential pressure sensor using a silicone rubber membrane has been fabricated on the selectively diffused (100)-oriented n/n^(+)/n silicon substrates by an unique silicon micromachining technique using porous silicon etching. The width, length, and thickness of the beam is 120 μn, 600 μm, and 6 μm, respectively, and the thickness of the silicone rubber membrane was 36 gm. By the use of four-beam structure, the mechanical strength of the differential pressure sensor can be highly improved due to smaller shear stress. And the lower sensitivity of the sensor can be simply solved by combining two output signals of half-bridge. The effectiveness of the sensor is confirmed through an experiment and FEM simulation in which the differential pressure sensor is characterized.