http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
플라즈마 정보인자를 활용한 SiO<sub>2</sub> 식각 깊이 가상 계측 모델의 특성 인자 역할 분석
장윤창,박설혜,정상민,유상원,김곤호,Jang, Yun Chang,Park, Seol Hye,Jeong, Sang Min,Ryu, Sang Won,Kim, Gon Ho 한국반도체디스플레이기술학회 2019 반도체디스플레이기술학회지 Vol.18 No.4
We analyzed how the features in plasma information based virtual metrology (PI-VM) for SiO2 etching depth with variation of 5% contribute to the prediction accuracy, which is previously developed by Jang. As a single feature, the explanatory power to the process results is in the order of plasma information about electron energy distribution function (PIEEDF), equipment, and optical emission spectroscopy (OES) features. In the procedure of stepwise variable selection (SVS), OES features are selected after PIEEDF. Informative vector for developed PI-VM also shows relatively high correlation between OES features and etching depth. This is because the reaction rate of each chemical species that governs the etching depth can be sensitively monitored when OES features are used with PIEEDF. Securing PIEEDF is important for the development of virtual metrology (VM) for prediction of process results. The role of PIEEDF as an independent feature and the ability to monitor variation of plasma thermal state can make other features in the procedure of SVS more sensitive to the process results. It is expected that fault detection and classification (FDC) can be effectively developed by using the PI-VM.
민항기 door damper용 칼날형 댐핑 오리피스의 설계
홍예선(Yeh-Sun Hong),권용철(Yong-Cheol Kwon),김종혁(Chong-Hyeok Kim),박설혜(Seol-Hye Park),박호열(Ho-Yeol Park),김상범(Sang-Beom Kim) 한국항공우주학회 2012 韓國航空宇宙學會誌 Vol.40 No.12
본 논문에서는 작동유의 최대 동점성 계수가 400cSt까지 변하는 조건에서 항공기 도어댐퍼용 칼날형 댐핑 오리피스를 설계하였다. 전산 유동 해석과 실험을 통하여 칼날 오리피스의 유량계수를 분석하였고, 오리피스의 크기와 칼날 각도, 유동방향, 레이놀즈수가 미치는 영향을 고려하였다. 이 결과를 바탕으로 오리피스의 크기에 따라 댐퍼의 성능 기준을 충족시키기 위해 제한해야 하는 댐퍼의 쿨롱 마찰력 범위를 유도하였다. In this paper a sharp-edged type damping orifice for an aircraft door damper were designed, where the dynamic viscosity of working fluid were assumed to change up to 400cSt. The discharge coefficient of the damping orifice were investigated by CFD analyses and experiments. In particular, the influences of orifice diameter, edge angle, flow direction and the Reynolds number were taken into consideration. Based on this, it has been deduced how high Coulomb friction forces of damper seals is to be allowed to meet the performance criterion with respect to the orifice size.