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반도체 장비용 직교 로봇의 스틸 밴드 마모 문제 해결에 관한 연구
김종균,이송연,허용정,Kim, Jong Gyun,Lee, Song Yeon,Huh, Yong Jeong 한국반도체디스플레이기술학회 2021 반도체디스플레이기술학회지 Vol.20 No.3
Cartesian robot is used in semiconductor manufacturing. Friction between steel band and mover wears the steel band. The emission of wear particle from steel band contaminates semiconductor equipment. At the manufacturing site, the steel band is replaced periodically to minimize the generation of wear particle. But this is not a good way to minimize the generation of wear particle, because it is hard to specify the moment of replacement. We suggested the methodology to minimize the generation of wear particle using TRIZ technique. Also we made prototype robot which the solution is applied, and the performance of the solution was verified through experiments. As a result of verification, it was confirmed that the solution significantly reduced the generation of wear particle compared to the standard way.
부하토크 피드포워도 제어를 이용한 유도전동기의 속도제어
서영수(Young-Soo Seo),임영배(Young-Bae Lim),김영춘(Young-Chun Kim),성대용(Dae-Yong Sung),김종균(Jong Gyun Kim) 전력전자학회 1997 전력전자학술대회 논문집 Vol.1997 No.-
This thesis proposed a speed control system for induction motors robust to variations in torque and parameters by feeldorward compensating the current portion of load torque adding a load torque observer to the conventional PI controller in the indirect vector controlled induction motor system.<br/> In conclusion, this thesis demonstrate the improved transient characteristic to variations in reference speed and load torque, compared to the conventional PI control method, by means of the feedforward control of the estimated load torque.
상태관측기를 이용한 유도전동기의 부하토크 피드포워드 제어
송호빈,서영수,임영배,성대용,김종균 明知大學校 産業技術硏究所 1997 産業技術硏究所論文集 Vol.16 No.-
This thesis proposed a speed control system for induction motors robust to variations in torque and parameters by feedforward compensating the current portion of load torque, adding a load torque observer to the conventional PI controller in the indirect, vector controlled induction motor system. In the proposed system, in this thesis, the load torque is estimated by the least order load torque observer based on the torque component of vector-controlled induction motor. Thus system composition is simplified. In conclusion, this thesis demonstrate the improved transient characteristic to variations in reference speed and load torque, compared to the conventional PI control method, by means of the feedforward control of the estimated load torqued.