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이중탐침과 마이크로파 간섭계를 이용한 헬리콘 플라즈마 분석
정재국,윤옥자,전원배 中央大學校 基礎科學硏究所 2001 基礎科學硏究所 論文集 Vol.15 No.-
The results of experimental investigations of high density plasma source excited by helicon wave under RF and low magnetic field are presented. We have generated high density helicon plasma over 10^17m_-3 in rf power(~1kW), low magnetic field(~300Gauss) with Nagoya type Ⅲ(m=1 mode) antenna at gas pressure(5mTorr). the densities of plasma in our plasma source are observed by double Langmuir probe and microwave interferometer. The B-field and input power dependance of the plasma density are presented and compared with other experimental characteristics. A study of the density profile and the electron temperature distribution has aided in the understanding of the helicon plasma generation. these are plotted along by z-axis, applied rf-power, magnetic field respectively.