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Study of Silicon Oxidation in a Remote Plasma-Enhanced Rapid Thermal Processor
Sangrae Joo,Kwang Soon Lee,Hyewon Lee 한국물리학회 2007 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.51 No.II
Silicon oxidation in a commercially developed 12-inch remote plasma-enhanced rapid thermal processor (RPERTP) has been studied experimentally and numerically. The numerical simulator was constructed using a commercial computational fluid dynamics (CFD) program. In the simulator, the surface reaction was represented by the sticking coefficients, and their values were determined to fit the experimental results. Experiments showed that the silicon oxide growth was significantly enhanced by the O radical in the remote plasma and was quite uniform over the wafer surface. Using the simulator, we investigated the effects of the operating variables and the gas inlet port on the uniformity of oxide growth.
Sangrae Shim,Min Young Yoon,Sue Kyung Kim,Taeyoung Lee,Yang Jae Kang,Moon Young Kim,Kyujung Van,Suk-Ha Lee 한국육종학회 2012 한국육종학회 심포지엄 Vol.2012 No.07
Recent release of whole genome draft sequences in legume species have led comparative genome studies among legume plants including Glycine max, G. soja, Cajanus cajan and Medicago truncatula. The majority of comparative genomic researches have been conducted based on synteny of coding sequences and coding sequence variations may be one of major forces for speciation and evolution. However, non-coding sequences have been also reported to be important phenotypic regulators. Especially, since short sequence motifs in the promoter regions are highly conserved, they are suggested to be another resources of interests in comparative studies. In this study, we predicted the conserved short sequence motifs by BLASTN algorithm using dicot promoter database from Softberry (http://www.softberry.com). A total of 37,396 conserved short sequence motifs were identified onto 2 kb upstreams of 46,367 high confident gene model of G. max (cv. Williams 82). Meanwhile, whole genome of 7 soybean landraces (G. max) and 7 wild soybean genotypes (G. soja) were sequenced at low depth of less than ten using Illumina Hiseq 2000. Among these genotypes, nucleotide variations were identified in predicted conserved regulatory motifs by mapping of short reads to the reference genome sequence using the Samtools program (http://samtools.sourceforge.net/). Fifteen and two genes, which have SNPs in regulatory motifs and no SNP in coding sequence, were identified by comparisons of inter-species and intra-species, respectively. qRT-PCR experiments are in progress for investigating differences of these 17 genes expressions at transcriptional level.
이상래(Sangrae Lee),김재훈(Jae-hoon Kim),고성호(Sungho Ko) 한국추진공학회 2023 한국추진공학회지 Vol.27 No.3
This study targeted a hybrid electric propulsion system, which uses both an electric motor and a gas turbine, of Advanced Air Mobility being studied to build a new 3D transportation network. The hybrid engine system requires cooling of the gas turbine and electric motor for smooth operation, and this cooling achieved by circulating antifreeze through the cooler. The present study predicted the performance of an antifreeze cooler that cools the antifreeze heated by the heat of the engine and motor. In particular, the change in the outlet state of the antifreeze cooler was predicted for the thermal inlet state, which varies depending on the operating state and the speed of the aircraft. In addition, the validity of the predicted value was confirmed by comparing it with the test value from performance test through the test rig based on the predicted value.