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안승준,김대욱,김영철,안성준,김영정,김호섭,Ahn S,Kim D. W,Kim Y. C,Ahn S. J,Kim Y. J,Kim H. S 한국재료학회 2004 한국재료학회지 Vol.14 No.3
An electron beam microcolumn composed of an electron emitter, micro lenses, scan deflector, and focus lenses have been fabricated and tested in the STEM mode. In this paper, we report a technique of precisely aligning the electron lenses by the laser diffraction patterns instead of the conventional alignment method based on aligner and STM. STEM images of a standard Cu-grid were observed using a fabricated microcolumn under both the retarding and accelerating modes.
WSi<sub>2</sub> word-line 및 bit-line용 spacer-Si<sub>3</sub>N<sub>4</sub> 박막의 증착
안승준,김대욱,김종해,안성준,김영정,김호섭,Ahn S.,Kim D.W.,Kim J.H,Ahn S.J.,Kim Y.J.,Kim H.S. 한국재료학회 2004 한국재료학회지 Vol.14 No.6
$WSi_2$, $TiSi_2$, $CoSi_2$, and $TaSi_2$ are general silicides used today in semiconductor devices. $WSi_2$ thin films have been proposed, studied and used recently in CMOS technology extensively to reduce sheet resistance of polysilicon and $n^{+}$ region. However, there are several serious problems encountered because $WSi_2$ is oxidized and forms a native oxide layer at the interface between $WSi_2$ and $Si_3$$N_4$. In this study, we have introduced 20 $slm-N_2$ gas from top to bottom of the furnace in order to control native oxide films between $WSi_2$ and $Si_3$$N_4$ film. In resulting SEM photographs, we have observed that the native oxide films at the surface of $WSi_2$ film are removed using the long injector system.
접지품질 개선을 위한 접지저항 최적화 및 접지충진제의 전기적 특성 연구
박철근(Park Chul-Geun),안성준(Ahn Seong-Joon),우제욱(Woo, J.W.),안수준(Ahn, S.J.),유용정(Yu, Y.J.),안승준(Ahn Seung-Joon) 한국산학기술학회 2006 한국산학기술학회논문지 Vol.7 No.6
시설물이나 장비로 surge wave가 유입되는 것을 방지하기 위해서는 접지시스템의 접지저항을 수 Ω 정도로 낮추어야 하지만 시공비를 낮추기 위하여 적절한 접지저항 값을 결정하는 것이 중요한 문제이다. 본 연구에서는 접지 저항 simulator를 이용하여 최적화된 경제적 접지저항(임피던스) 값을 설정하였으며 수용성 알칼리족 원소와 활성탄소를 주성분으로 하는 새로운 접지충진제를 개발하여 접지품질을 개선하기 위한 전기적 특성을 평가하였다. In earthing technologies, the intrusion of the surge wave can be protected when the earthing resistance is as low as several ohms. However, the cost for realizing such a low resistance is quite high. Therefore it is important to determine appropriate target value of the earthing resistance to install cost-effective grounding system. In this work, we have proposed an optimization method of the earthing resistance according to the various environmental parameters by using a numerical simulator. We have also developed new catalyst composed of water-soluble alkaline elements and activated carbon and investigated its electrical characteristics for enhancement of the earthing qualities.