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ZnO 나노와이어를 이용한 FET 소자 제작 및 특성 평가
김경원(K.W. Kim),오원석(W.S. Oh),장건익(G.E. Jang),박동원(D.W. Park),이정오(J.O. Lee),김범수(B.S. Kim) 한국표면공학회 2008 한국표면공학회지 Vol.41 No.1
The zinc oxide(ZnO) nanowires were deposited on Si(001) substrates by thermal chemical vapour deposition without any catalysts. SEM data suggested that the grown nanostructures were the well-aligned ZnO single crystals with preferential orientation. Back-gate ZnO nanowire field effect transistors(FET) were successfully fabricated using a photolithography process. The fabricated nanowire FET exhibits good contact between the ZnO nonowire and Au metal electrodes. Based on I-V characteristics it was found out that the ZnO nonowire revealed a characteristic of n-type field effect transistor. The drain current increases with increasing drain voltage, and the slopes of the Ids-Vds curves are dependent on the gate voltage.
ZnO 나노막대가 형성된 STO기판에 증착한 Y-Ba-Cu-O 박막의 미세구조 분석
오세권,장건익,강병원,김경원,이초연,현옥배,Oh, S.K.,Jang, G.E.,Tran, H.D.,Kang, B.W.,Kim, K.W.,Lee, C.Y.,Hyun, O.B. 한국초전도학회 2009 Progress in superconductivity Vol.11 No.1
For many large-scale applications of high-temperature superconducting materials, large critical current density ($J_c$) in high applied magnetic fields are required. A number of methods have been reported to introduce artificial pinning centers in $YBa_2Cu_3O_{7-{\delta}}$ films for enhancement of their $J_c$. We studied the microstructures and characteristic of $YBa_2Cu_3O_{7-{\delta}}$ films fabricated on $SrTiO_3$ (100) substrates with ZnO nanorods as pinning centers. Au catalyst nanoparticles were synthesized on STO substrates with self assembled monolayer to control the number of ZnO nanorods. The density of Au nanoparticles is approximately $240{\sim}260{\mu}m^{-2}$ with diameters of $41{\sim}49nm$. ZnO nanorods were grown on STO by hot-walled PLD with Au nanoparticles. Typical size of ZnO nanorod was around 179 nm in diameter and $2{\sim}6{\mu}m$ in length respectively. YBCO films deposited directly on STO substrates show the c-axis orientation, while YBCO films with ZnO nanorods exhibit any mixed phases without any typical crystal orientation.