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임호준,유영석,김동우,고유빈,문봉진,Vincent Lehane 한국물리학회 2019 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.75 No.7
The performance test of a laboratory based ambient pressure X-ray photoelectron spectroscopy (AP-XPS) system at the Gwangju Institute of Science and Technology (GIST) was carried out. The system, consisted of a Scienta R4000 HiPP-3 electron analyzer and a monochromatized Al K$\alpha$ X-ray source, is designed to operate a gas pressure of up to 25 Torr. An Al polyimide X-ray window is used to isolate the X-ray source from the back-filled-type ambient pressure measurement chamber. Two modes of XPS operations were tested, a one-dimensional chemical imaging mode and a transmission mode. In the transmission mode, the lens voltage of analyzer was optimized for maximum detection of photo-excited electrons under elevated pressure condition, $i.e.$, a typical standard lens operation mode. On the other hand, in the imaging mode, spatial information on the outgoing electrons is conserved to generate a one-dimensional chemical image of surface being measured. The test of the imaging mode on a Au/Si reference sample showed a spatial resolution of $\sim$10 $\mu$m under an Ar gas pressure of 500 mTorr. With the superb design of the differential pump and the electron transfer optics, a good signal-to-noise ratio was obtained for the XPS core-level spectra at Ar gas pressure up to 1 Torr.
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