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레이저 증착법에 의한 탄소계 박막의 구조 및 전계방출특성
류정탁,김연보,Kenjiro Oura 한국전기전자재료학회 2002 전기전자재료학회논문지 Vol.15 No.7
Using laser ablation technique carbon thin films were deposited on Si(100) substrate as a function of substrate temperature. In this study, the surface morphologic, structural and field emission properties of these carbon thin films were investigated using Raman spectroscopy, scanning electron microscopy, and a diode technique, respectively. With increasing of the substrate temperature, the surface morphologies were changed significantly. Moreover, the intensity of D-band and the full width at half maximum of these bands were dependent on substrate temperatures. As the substrate temperature was increased, the field emission properties were improved. As the result, we find that the field emission properties of the films were changed significantly with the substrate temperature and structural features of carbon than films.
Field electron emission from amorphous carbon thin films grown by RF magnetron sputtering
Jeong-Tak Ryu,Shin-Ichi Honda,Mitsuhiro Katayama,Kenjiro Oura 한국물리학회 2005 Current Applied Physics Vol.5 No.4
Using a RF magnetron sputtering, amorphous carbon (a-C) and N-doped a-C (a-C:N) thin lms were fabricated as eld electronemitter. These thin lms were deposited on Si(001) substrate at several temperatures. The eld emission property was improved fora-C thin lms grown at higher substrate temperatures. Furthermore, a-C:N lm exhibits eld emission property better than that ofundoped a-C lm. These results are explained in terms of the change in surface morphology and structural properties of a-C lm..