http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
ANCOVA를 이용한 반도체공정 스크러버 HF가스 제거 개선
김선진 ( S. J. Kim ),이민우 ( M. Lee ),서준 ( J. Xu ),최영아 ( S. Lim ),이현호 ( H. Lee ),구준모 ( J. Koo ) 한국분무공학회 2013 한국액체미립화학회지 Vol.18 No.2
To comply with the regulation of the reinforcing Clean Air Conservation Act, it is necessary for the semiconductor manufactures to develop effective low-concentration acid gas abatement system to treat the flue gas. The low-concentration acid gas was found to be harder to deal with than the high-concentration one. In this study, the effect of various potential treatments such as air-assist nozzle spraying, magnetizing the scrubbing water, and adding surfactants to spraying and scrubbing water were investigate through the application of the statistical ANCOVA method, which was proved to be very useful tool when the inlet concentration of acid gas could not be controlled precisely and it affected the removal efficiency of the abatement system.