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Gon-Jae Lee,Duck-KyunChoi 한양대학교 세라믹연구소 2020 Journal of Ceramic Processing Research Vol.21 No.S1
Recently, the electrical performance requirements of the sensor elements used in electric vehicles have been strengthened. Automotive pressure sensors are manufactured by bonding metal diaphragms and MEMS sensing elements. The withstandvoltage of the pressure sensor is greatly affected by the electrical characteristics of the adhesive material between the metaldiaphragm and the MEMS sensing element connected to the vehicle body. In this study, the withstand voltage of the sensorelement was analyzed using glass paste as the bonding material for the glass paste process. As a result, it was found that thisvoltage was greatly influenced by the remaining glass paste porosity remaining following the glass paste process, and also bythe area and thickness of the glass paste. Therefore, it was found that the thickness and area of the glass paste should beoptimized and that the internal porosity should be minimized to obtain excellent withstand voltage characteristics in thesensing device.
Characterization of Ultra-Thin HfO2 Gate Oxide Prepared by Using Atomic Layer Deposition
TaehoLee,안진호,JaeminOh,YangdoKim,Young-BaeKim,Duck-KyunChoi,JaehakJung 한국물리학회 2003 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.42 No.III
Ultra-thin hafnium-oxide lms were deposited by using atomic layer deposition. The impurity distribution and the lm properties were studied in the deposition temperature range between 200 C and 400 C. Suppressed crystallization with eective Cl impurity reduction was obtained at medium temperature (300 C), which resulted in a hafnium-oxide lm with a low leakage current (2.06*10-7A/cm2 at -2.0 MV/cm) and a small equivalent oxide thickness value (23.9 A) at the same time.