http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
Nanoimprint technology for nano-structured optical devices
K.D. Lee,S.W. Ahn,S.H. Kim,S.H. Lee,J.D. Park,P.W. Yoon,D.H. Kim,이상신 한국물리학회 2006 Current Applied Physics Vol.6 No.1l
We present the fabrication method for various nano-structured optical devices such as a nanowire grid polarizer, a Bragg grating l-ter, and an optical ring resonator to demonstrate feasibility of nanoimprint technology for manufacturing nanoscale optical devices. Atwice higher than that of the commercially available 70 nm half-pitch one. Generation of the uniform and seamless 50 nm half-pitchmetal gratings over the large area is impossible or impractical with lithographic techniques other than NIL. The Bragg grating lterand optical ring resonator were fabricated in low-loss optical polymers simply by means of a single imprint process which does notrequire conventional photolithography and reactive ion etching processes. This work demonstrates the possibility of a low cost produc-tion of planar waveguide circuits for optical communications