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안병건,추관식,문두수,안정식,김영대,김형자,이규용 釜慶大學校 2002 釜慶大學校 論文集 Vol.7 No.-
Low energy high current N_2 ion beam was used to modify the morphology and chemical composition of cemented carbide WC-Co(Co:10 wt%, TiC + TaC:15 wt%, WC:bal) hard material surface for the fabrication of the TiN thin film by sol-gel method. The effects of ion beam treatment on preparation of the TiN thin film by sol-gel mothod were investigated by XPS, SEM, AFM and GXRD. According to the N_2 ion beam bombardment, the surface roughness was increased and TiC binders in WC were dissolved. The dissolved Ti was recombind with nitrogen ion to form the TiN nucleuses which were acted as seeds for the forming of the TiN thin film on the cemented WC-Co surface. Besides, the sputter deposited Ti interlayer prevented the diffusion of TiO_2 sol into the porous WC-Co during the formation of TiN thin film.