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최수창(Soochang Choi),이상민(Sang-Min Lee),김진근(Jin-Guen Kim),이득우(Deug-Woo Lee) 한국생산제조학회 2010 한국공작기계학회 추계학술대회논문집 Vol.2010 No.-
Recently, the industry requires more precise dimensional accuracy and smaller sized parts according to the down-scaled product size. From these industrial trends, accurate measuring system for the fine dimensional metrology in nanometer scale is essential using a high accuracy and hybrid machining system. This study describes the analysis of positioing system for the Nano based hybrid machining system, in which machining micro/nano parts with micro/nano accuracy is possible. As a result, it was possible to design a platform and the smallest deformation was found to be at 10㎚.
황진하(Jin-Ha Hwang),이상민(Sang-Min Lee),최수창(Soochang Choi),이득우(Deug-Woo Lee) 한국생산제조학회 2011 한국생산제조시스템학회 학술발표대회 논문집 Vol.2011 No.4
Recently, the industry requires more precise dimensional accuracy and smaller sized parts according to the down-scaled product size. From these industrial trends, accurate measuring system for the fine dimensional metrology in nanometer scale is essential using a high accuracy and hybrid machining system. This study describes the development of Hybride Multi-axis Machine system for Micro EDM, in which machining micro/nano parts with micro/nano accuracy is possible.