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LIGA - like 공정으로 제작된 마이크로 터빈의 유한 요소 해석
오재근(J . G . Oh),최범규(B . K . Choi),김낙수(N . S . Kim) 한국센서학회 2000 센서학회지 Vol.9 No.5
N/A The finite element analysis of a micro turbine was made to investigate safety margin of its operating condition for the high aspect ratio nickel micro turbine blades fabricated by conventional LIGA-like method. From our study, we found that the fabricated turbine could not exceed its yield strength even if the pressure difference between inlet and outlet of turbine blade was about 44kPa, and the correlation of friction coefficient and the maximum stress, caused by contact friction between outer diameter of shaft and inner diameter of turbine blade, was somewhat reciprocal. The maximum stress was decreased with the increasing contact friction, when turbine blade was in its state of rotation. By the results of our study, we conclude that it is possible to fabricate metal micro turbine more easily than surface micromachining technology and to operate with no risk of metal structure`s damage, which is caused by yield strength, if the operating condition with the design of micro turbine itself are optimized. It is useful to adopt other applications which have the contact problems between a moving part and the faced one in micro structures.
100X110μm² micro mirror array의 제작과 실험
지창현,정석환,신종우,김용권,최범규,안세진 경북대학교 센서기술연구소 1995 센서技術學術大會論文集 Vol.6 No.1
A 100 x110μm^(2) aluminum micro structure is fabricated using thick photoresist as sacrificial layer and mold for nickel electroplating. The micro structure is composed of aluminum plate, hinge, nickel support post, and address electrode. The aluminum plate is overhung about 10 μm above the silicon substrate supported by two nickel posts. The hinge connects the aluminum plate and the support post and works as a torsional spring. We used thick PR as 10 μm thick sacrificial layer and nickel electroplating mold and electroplated nickel for 10 μm high post. The aluminum plate is actuated by electrostatic force between the aluminum plate and the address electrode. The aluminum micro structure is finally released by reactive ion etching (RIE) using O_(2). The micro mirror is actuated at 35V.