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Study of Mold Elastic Rigidity during UV Imprinting Process
장시열 대한금속·재료학회 2014 ELECTRONIC MATERIALS LETTERS Vol.10 No.6
The duration and magnitude of imprinting pressure are very influential in the imprinting process, especially in window-open imprinting process. Resin flows spread over the imprinting area according to both the squeeze motion of the mold and the pressure gradient of the mold cavity-protrusion structure, which causes relatively large contact pressure concentrated in certain locations on the imprinting area. The concentrated contact pressure distorts the mold shape, which then results in pattern distortion. When the pattern density of the mold is unevenly distributed, especially across a large imprinting area, pattern distortion is easily influenced by the rigidity of the mold. To avoid pattern distortions, the imprinting period, and the magnitude and rate of the imprinting pressure must be optimized. In this study, variations in resin layer thickness and elastic deformation of mold materials are analyzed using elastohydrodynamic lubrication (EHL) theory. The film thicknesses of the resin layer are computed down to ~nm and compared with the consideration of the elastic rigidity of the mold materials and without.
초저종횡비 나노 스케일의 탄성유체윤활 유막 두께 측정에 관한 연구
장시열,공현상 한국트라이볼로지학회 2004 한국트라이볼로지학회 학술대회 Vol.38 No.-
The measurement of ultra low aspect ratio fluid film thickness is a necessity for the verification of lubrication media characteristics and clearance design in many precision components such as MEMS, bearings and other slideways. Many technologies are applied to the measurement of ultra low aspect ratio fluid film thickness (i.e. elastohydrodynamic lubrication film thickness). In particular, in-situ optical interferometric method has many advantages in making the actual contact behaviors realized with the experimental apparatus. Careful selection of incident lights greatly enhances the fringe resolutions up to ~1.0 nanometer scale with digital image processing technology. In this work, it is found that coaxial aligning trichromatic incident light filtering system developed by the author can provide much finer resolution of ultra low aspect ratio fluid film thickness than monochromatic or dichromatic incident lights, because it has much more spectrums of color components to be discriminated according the variations of film thickness. With some measured interferometric images of ultra low aspect ratio fluid film thickness it is shown how the film thickness is resolutionized and measured in nanometer scale with digital image processing technology and space layer method.
Analysis of Residual Layer Thickness of Resin in an Imprinting Process Using a Soft Mold
장시열,Taek Kyoung Lee,이재갑 대한금속·재료학회 2013 ELECTRONIC MATERIALS LETTERS Vol.9 No.5
The selection of proper mold material for an imprinting process is important with respect to the manufacturing cost of the mold as well as the interfacial material mechanics between the resin and the mold. Among the various material characteristics of the mold, its rigidity is an influential factor for the distribution shape of the residual layer thickness (RLT) of the resin, and is therefore an important consideration for subsequent etching processes (window open processes) that remove the residual resin layer. In this work, variations in the RLT for a rectangular mold structure are simulated using thin film lubrication theory and compared with experimental results from an imprinting process.