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장기환(Ki-Hwan Jang),이현택(Hyun-Taek Lee),김충수(Chung-Soo Kim),추원식(Won-Shik Chu),안성훈(Sung-Hoon Ahn) Korean Society for Precision Engineering 2014 한국정밀공학회지 Vol.31 No.12
Hybrid manufacturing technology has been advanced to overcome limitations due to traditional fabrication methods. To fabricate a micro/nano-scale structure, various manufacturing technologies such as lithography and etching were attempted. Since these manufacturing processes are limited by their materials, temperature and features, it is necessary to develop a new three-dimensional (3D) printing method. A novel nano-scale 3D printing system was developed consisting of the Nano-Particle Deposition System (NPDS) and the Focused Ion Beam (FIB) to overcome these limitations. By repeating deposition and machining processes, it was possible to fabricate micro/nano-scale 3D structures with various metals and ceramics. Since each process works in different chambers, a transfer process is required. In this research, nanoscale 3D printing system was briefly explained and an alignment algorithm for nano-scale 3D printing system was developed. Implementing the algorithm leads to an accepted error margin of 0.5% by compensating error in rotational, horizontal, and vertical axes.
INTEGRATED CAD/CAM FOR NANOSCALE 3D PRINTING USING AFN PRINTING AND FIB
Hae-Sung Yoon(윤해성),Ki-Hwan Jang(장기환),Eun-Seob Kim(김은섭),Hyun-Taek Lee(이현택),Hyunseo Park(박현서),Dae-Wook Kim(김대욱),Chung-Soo Kim(김충수),Gil-Yong Lee(이길용),Kunwoo Lee(이건우),Sung-Hoon Ahn(안성훈) (사)한국CDE학회 2015 한국 CAD/CAM 학회 학술발표회 논문집 Vol.2015 No.동계
이현택(Hyun-Taek Lee),이길용(Gil-Yong Lee),김충수(Chung-Soo Kim),최정오(Jung-Oh Choi),박재일(Jae-Il Park),송지현(Ji-Hyun Song),장기환(Ki-Hwan Jang),이건우(Kun-Woo Lee),안성훈(Sung-Hoon Ahn) (사)한국CDE학회 2014 한국 CAD/CAM 학회 학술발표회 논문집 Vol.2014 No.2
Fabrication of Micro/Nanostructures is come into the spotlight because of its potential at healthcare, electronic device and military related applications. However, existing fabrication processes contains limits in terms of rapid prototyping, due to its complicate manufacturing process, difficulties in achieving complex structure and limit of available materials. Herein, we developed novel nanoscale 3D printing system by integrating nanoparticle deposition system and focused ion beam.