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광통신 용 VCSEL Array 상에 Microlens Array를 집적하기 위한 UV 성형 공정기술 개발
한정원(Jeongwon Han),김석민(Seok-min Kim),김홍민(Hongmin Kim),이지승(Jeeseung Lee),임지석(Jiseok Lee),강신일(Shinill Kang) 한국정밀공학회 2004 한국정밀공학회 학술발표대회 논문집 Vol.2004 No.10월
UV molding is a process for integrating micro/nano polymeric optical components on optoelectronic modules. In the present study, a microlens array for vertical cavity surface emitting laser(VCSEL) to fiber coupling was designed, integrated and tested. At the design stage, design variables ware optimized to maximize the coupling efficiency, and tolerance analysis was carried out. At the integration stage, the UV transparent mold was fabricated and the microlens array on VCSEL array was integrated by UV molding process. Finally the coupling efficiency of VCSEL to fiber was measured and analyzed.