http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
플라즈마 화학 증착법에 의한 $Al_2$ $O_3$ 단층피막과 $Al_2$ $O_3$/( $Ti_{0.5}$ $Al_{0.5}$)N 이중피막의 제조 및 특성에 관한 연구
손경석,이승훈,이동각,임주완,이후철,이정중 한국표면공학회 2001 한국표면공학회지 Vol.34 No.2
$Al_2$$O_3$ coatings were deposited on M2 high speed steels by the plasma enhanced chemical vapor deposition (PECVD) process, using a gas mixture of AlC1$_3$, $H_2$, $CO_2$ and Ar $Al_2$$O_3$ coatings had interference color and showed amorphous phase. $A1_2$X$A1_3$/($Ti_{0.5}$ /$Al_{0.5}$ )N double layer coatings were produced in the sequence of substrate $NH_3$ plasma pretreatment, ($Ti_{0.5}$$Al_{0.5}$)N depoition process, $Al_2$$O_3$ deposition process. $Al_2$ $O_3$/( $Ti_{0.5}$A $l_{0.5}$)N double layer coatings showed NaCl structure in ( $Ti_{0.5}$A $l_{0.5}$)N layer and amorphous phase in A1$_2$ $O_3$ layer. It was shown that $Al_2$ $O_3$ columns continuously grew onto ( $Ti_{0.5}$A $l_{0.5}$)N columns. ( $Ti_{0.5}$A $l_{0.5}$)N single coating and $Al_2$ $O_3$/( $Ti_{0.5}$A $l_{0.5}$)N double layer coating were oxidized at $700^{\circ}C$, 80$0^{\circ}C$, 90$0^{\circ}C$ for 1hr, 3hr in atmosphere. At 80$0^{\circ}C$, single layer coatings were oxidized, which were examined substrate oxide particle. But $Al_2$ $O_3$/ ( $Ti_{0.5}$A $l_{0.5}$)N double layer coatings maintained the asdeposited state. Therefore, $Al_2$ $O_3$/ ( $Ti_{0.5}$A $l_{0.5}$)N double layer coatings have moreexcellent oxidation resistance than ( $Ti_{0.5}$A $l_{0.5}$)N single layer coatings.X> 0.5/)N single layer coatings.s.
플라즈마 화학기상증착법에 의해 제조된 TiN 피막의 색깔, 구조 및 특성에 미치는 반응기체 유량비의 영향에 대한 연구
이정중,김병준,나재웅,이동각 대한금속재료학회(대한금속학회) 1998 대한금속·재료학회지 Vol.36 No.12
TiN coatings were deposited on M2 high speed steel by the plasma enhanced chemical vapor deposition(PECVD) process using a gas mixture of TiCl₄, NH₃, H₂ and Ar with various NH₃/TiCl₄ flow rate ratios(Q(NH₃)/Q(TiCl₄)), and the effect of the flow rate ratio on the color, structure and property of TiN coatings has been investigated. Structural and compositional analyses were conducted by X-ray diffraction method(XRD), transmission electron microscopy(TEM), Rutherford backscattering spectroscopy(RBS), as well as Auger electron spectroscopy(AES). At low flow rate ratios, bright gold coatings with high hardness and low resistivity could be formed. At higher ratios, on the other hand, coatings of brown color were formed. They showed porous microstructures with considerably decreased microhardness. Results from structural and compositional analyses showed that a large amount of oxygen had been substitutionally incorporated in the brown color TiN during the deposition process to form titanium oxynitride. It has been found, however, that the color change of TiN coatings is closely related with the surface roughness of the coating rather than with the presence of oxygen in the coating.