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Magnetoelastic Force Sensor Using Amorphous Alloy
손대락,김창석,Son, D.,Kim, C.S. The Korean Magnetics Society 1991 韓國磁氣學會誌 Vol.1 No.1
비정질 합금의 최대자기유도변화를 이용한 힘센서를 제작하였다. 시편의 단면적이 $6{\times}10^{-8}/m^{2}$이고 힘의 범위가 0-1N에서 힘센서의 선형도는 0.1% 이상이였으며, 분해능이 $1{\times}10^{-4}N$ 이였다. 또한 이 힘센서는 자화주파수와 동일한 셈플링속도로 과도적인 힘을 측정할 수 있음을 보여 주었다. A force sensor which employ the measurement of the change in the maximum induction of an amorphous core was constructed. This force sensor has a standard deviation of the non-linearity less than 0.1% within the range of 0 to 1 N, and a resolution of $1{\times}10^{-4}N$ for the core cross section of $6{\times}10^{-8}/m^{2}$. The sensor can also measure transient force at a sampling rate of 10 kHz which is the same as the magnetizing frequency of the core.
손대락,임순재,유중렬,김창석 경북대학교 센서기술연구소 1991 센서技術學術大會論文集 Vol.2 No.1
인장 및 압축응력에 의한 비정질합금의 최대자기유도의 변화를 이용한 힘센서와 토오크센서를 제작하였으며, 코아제료는 Co-계열의 비정질 리본(C_(62)Ni_(15)Si_(8)B_(15). 포화자왜 λ_(s) = -6x10^(-6))을 사용하였다. 힘센서의 경우 Roberval원리의 전자저울을 제작하였으며, 폭 2 mm 길이 50 mm 두계 30 μm 의 리본을 as-quenched 비정질 리본으로부터 에칭하여 사용하였다. 제작된 힘센서의 선형도는 1 N 의 범위에서 0.1 % 미만이였으며, 분해능은 1 x 10(-4) N 이였다. 토오크센서를 제작하기위하여 glass fiber가 보강된 epoxy 막대를 사용하였으며, epoxy 막대에 폭 1 mm 길이 17 mm 두께 30 μm 인 비정질리본들을 축방향에 대하여 +45° 와 -45° 각도로 부착시 켰다. 제작된 토오크센서의 선형도는 1 % 미만이었으며, 이 센서는 회전축과 감지부가 전기적으로 비접촉으로 동적인 토오크를 측정할 수 이었다. The change of maximum magnetic induction of amorphous alloy under the tensile and compressive stress was used for the force and torque sensors. Co-based amorphous ribbon (Co_(62)Ni_(15)Si_(8)B_(15),saturation magnetostriction λs=6x10^(-6)), was used for the core material. In the case of the force sensor, we have constructed a weighing machine based on the Roberval principle. The amorphous strip core, 2 mm wide, 50 mm long and 30 μm thick, was atched from as-quenched amorphous ribbon. This force sensor shows that the linearity was better than 0.1 % in the range of 1 N, and sensitivity was 1 x 10^(-4)N. For the construction of the torque sensor, a glass fiber reinforced-epoxy rod was used as shaft. The amorphous strips, 1 mm wide, 17 mm long and 30 μm thick, was attached on the epoxy shaft in the direction of + 45° and -45°. The linearity of the torque sensor was better than 1 %, and this torque sensor can measure dynamic torque without electrical coupling between rotating shaft and sensing element.
강자성체 박막(Co-Ni)의 자기-저항효과에 관한 연구(2)
손대락,장충근,유중렬,남선우 한국센서학회 1994 센서학회지 Vol.3 No.1
Grid type 70Ni-30Co thin films on slide glass at 250℃ has been fabricated to develope. From fabricated sensors using above process, we investigated the relation of temperature, resistivity, line width to magnetoresistance and we obtained the following results after observation of coercive force, saturated magnetization, maxium usable sensitivity, duty time, slew rate, white noise, resolution of the sensors. We confirmed that the 600Å thin film at 250℃ formed crystalized magnetic anisotropy spontanernisly and the sensor using the thin film had capability of detecting magnetic field with sensitivity of 230 nT. In these devices, the magnetoresistance change was increased linearly in ±10 Oe range, and the magnetoresistance effect was increased when the ratio between line width and length was increased. When the devices was soldered using indium, the temperature-resistivity coefficient showed 8 X 10^(-3)/deg and increased during the specific properties as magnetic field sensor were weakened. In this studies, the coercive forces of the films were about 5.1 A/cm and saturated magnetizations were 0.64 T, and the delay time in these devises was 5 ㎲ and slew rate showed 0.39 Oe/us and white noise was -120 dB.