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액상유기화합물을 이용한 다이아몬드 필름증착에 있어서의 결정형태에 관한 연구
박동화,윤종선 한국공업화학회 1998 응용화학 Vol.2 No.2
Diamond film was synthesized on molybdenum substrate by chemical reaction of liquid organic compounds and hydrogen gas using the plasma jet at atmospheric pressure. The morphology of film deposited is cube (100) faces at the position of 6 mm away from the film center regardless of a kind of organic compound. When the toluene has been used as a precursor, a sharp diamond peak is observed at 1332 cm^(-1) with the temperature condition of 970℃, FWHM of 1332 cm^(-1) peak is on order of 5.9 cm^(-1). The presence of non-diamond carbon phase has been detected at the temperature of 1150℃.
박동화,윤종선 한국공업화학회 1997 응용화학 Vol.1 No.2
Diamond was synthesized on molybdenum substrate by chemical reaction of methane and hydrogen gas using the DC plasma jet at atmospheric pressure. The most important factors of diamond synthesis are the ratio of methane to hydrogen flow rates and the surface temperature of substrate. Experiments were carried out by changing the CH₄/H₂ ratios from 1% to 7% and diamond was well synthesized when the surface temperature of substrate was 970℃. The substrate temperature was measured by optical pyrometer.