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이광만,도양희,김영민 濟州大學校工科大學産業技術硏究所 1996 尖端技術硏究所論文集 Vol.7 No.2
Micro gas-flow sensor is fabricated using a microfabrication technology and micromachining techniques. An NON insulated film with low thermal conductivity and low internal stress is deposited by using LPCVD and APCVD process. As the micromachining technology, characteristics of silicon wet anisotropic etching are investigated. Experimental variations for (100) etch rate observation are following ; (1) TMAH concentrations in water (3∼25wt.%), (2) etch temperatures (80∼90℃). The etch rates for (100) silicon increases with increasing etch temperature and with decreasing TMAH wt.% concentration. Platinum thin films are deposited on the NON film by rf sputtering and lift-off method. Micro gas-flow sensor combined with platinum film heater and temperature detector is fabricated. And its operational characteristics are measured in the range of 0∼500sccm of nitrogen gas flow-rate. The gas-flow sensor have been shown a good linear relationship between the oxygen content in helium and the resistance of temperature detector within 0 to 18mol% of the oxygen contents. with the constant total flow-rate of 225sccm.
이광만,도양희 경북대학교 센서기술연구소 1997 연차보고서 Vol.1997 No.-
자동차 실내 환경제어용 센서시스템을 개발하기 위하여 마이크로 가스유량 센서와 습도센서를 설계하고 제조공정을 수행하였다. 1차년도의 연구결과를, 바탕으로 가스유량 센서의 경우, 히터와 반도체열전대를 NON 절연막 브리지에 형성한 구조를 하고있다. 습도센서의 경우, 단일 히터만이 NON 절연막 브리지 위에 형성된 간단한 구조를 하고 있다. 이들 마이크로 센서들을 CMOS공정과 실리콘 미세가공기술을 이용하여 제조하였다. 마이크로 센서시스템을 위한 기초연구로 가스유량센서와 습도센서를 동일 칩상에 조합하고 구동회로를 함께 집적한 스마트센서를 설계하였다. 설계된 구동회로와 마이크로 센서를 검증하였다. A micro gas-flow sensor and humidity sensor have been designed and fabricated for the development of the sensor system which can be applicable to the automotive interior environmental control. For the case of gas-flow sensor, a heater and semiconductor thermocouples were formed on the NON bridge based on the results of first research year's. For the case of humidity sensor, it have a simple structure compose of single heater formed on the NON bridge. These micro sensors were fabricated by CMOS process and silicon micromachining techniques. A smart sensor composed of gas-flow sensor, humidity sensor and driving circuits was designed for the basic research. The designed driving circuits and micro sensors were verified.
홀로그램 암호화와 간섭 복호화를 이용한 디지털 워터마킹
김병열,도양희 제주대학교 공과대학 첨단기술연구소 2002 尖端技術硏究所論文集 Vol.13 No.2
A new optical watermarking system is proposed. The proposed system is applied for digital watermarking by using binary phase hologram and Mach-Zehnder interferometer. A mark image to be hidden is randomly phase-modulated image, and its Fourier-transformed hologram image is superposed on the original image. The information for authentication is extracted by using Mach-Zehnder interferometer. The availability of the proposed watermarking system is confirmed by computer simulation.
고희선,김영민,권대혁,도양희,이광만 제주대학교 산업기술연구소 1999 尖端技術硏究所論文集 Vol.10 No.2
Silicon micromachining technology can be used to build microsensors and actuators by using tools derived from standard IC processing. For the silicon micromachining the etching characteristics of tetramethyl ammonium hydroxide (TMAH) by dissolving silicon powder or silicic acid have been studied. The 3, 5 and 10wt.% TMAH solutions, with dissolved silicon powder (6g/l) or with dissolved silicic acid(Si(OH)4, 16g/l) were used. And ammonium peroxydisulfate (APODS, 2g/l) dissolved in the solutions were also used. The etch rates of silicon and the etched surface roughness were observed with various etching conditions. The crystallographical aspect on the crystal orientation of silicon have been studied. With sufficiently fresh solutions, these TMAH concentration and combination of etchants, provide repeatable etch properties, does not attack exposed aluminum or silicon dioxode, and provide smooth (100) silicon surfaces.