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영구자석 이동형 리니어 모터를 이용한 초소형 공기베어링 스테이지
노승국(S. K. Ro),박종권(J. K. Park) 한국생산제조학회 2006 한국공작기계학회 춘계학술대회논문집 Vol.2006 No.-
In this paper, a new air bearing stage with magnetic preload and a linear motor has been developed for the future use in machine tools for micro factory. The new air bearing stage is unique in the sense that permanent magnets are used not only for preload but also for motion generation. The air bearings using porous pads were analyzed with numerical method, and the magnetic circuit model was derived for linear motor for calculating required preload force and thrust force. A prototype of single axis miniature stage was designed and fabricated and examined its performances, vertical stiffness, load capacity, thrust force and positioning resolution.
초정밀 스테이지를 위한 능동형 자기예압 공기베어링에 관한 연구
노승국(S. K. Ro),박천홍(C. H. Park),김수현(S. H. Kim),곽윤근(Y. K. Kwak) 한국정밀공학회 2006 한국정밀공학회 학술발표대회 논문집 Vol.2006 No.5월
A precise linear motion stage supported by magnetically preloaded air bearings is introduced where preloading magnetic actuators are combined with permanent magnets and coils to adjust air bearing clearance by controlling magnetic force actively. Each of the magnetic actuators has a permanent magnet generating nominal magnetic flux for required preload and a coil to perturb the magnetic force resulting adjustment of air-bearing clearance. The characteristics of porous aerostatic bearing are analyzed by numerical analysis, and analytic magnetic circuit model is driven for magnetic actuator to calculate nominal preload and variation of force due to current. A 1-axis linear stage motorized with a coreless linear motor and a linear encoder is built for verifying this design concept. With the active magnetic preloading actuators controlled with DSP board and PWM power amplifiers, the active on-line adjusting tests about the vertical, pitching and rolling motion were performed, and the result shows very good linearity.