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김강부,전종균,엄호성 선문대학교 2000 공학계열 논총 Vol.3 No.-
본 논문에서는 기존 반도체 공장의 세품 정밀도를 개선하기 위한 방안으로 정적보강올 실시하는 구조물에 대하여 동적 응답 을 실험적인 방법과 해석적 방법을 병행하여 예측하였다. 또한, 실험적인 방법과 해석적 방법의 상호적용을 위하여 진동제어 절차서를 제시하였다. 동특성 실험을 통하여 구조물의 지배 모드를 확인 하고, 모델해석과 비교하였다. 해석결과에서는 구조보강 前/後에 대하여 동일한 모드형상을 갖는 고유진동수를 4차까지 선정하여 강성 증가에 따른 변화를 비교하였다. 또한, 정적보강 前/後 구조물의 동적 특성을 비교하기 위하여 격자보 구조물에서 가장 취약할 것으로 판단되는 지점을 가진점으로 선정하여 주파수별 단위 하중에 대한 응답특성을 계산하였다. 실험/해석결과를 바탕으로 구조물의 정적보강을 통한 동적 응답의 기여도를 확인하였다. In this paper, dynamic response about the static stiffening reinforcement of structure by the experimental method and theoretical analysis has been predicted for the improvement of accuracy in the manufacturing process of semiconductor factory. Also, vibration control procedure is presented by the mutual working of the experimental method and theoretical analysis. Dominant vibration mode of the structure has been investigated by the experiments for the dynamic characteristics and compared with the model analysis of the structure. The change due to the increase of stiffening about the same mode shape for the four natural frequencies is investigated after(and before) the reinforcement of structure stiffness. Response characteristic about the weight at each band of frequency has been calculated at the exciting points in which the lattice-type structure has weakness mostly. The effect of dynamic response of the structure with reinforced static stiffness through the experimental and theoretical results is verified.
나노 측정시스템을 위한 방진 구조물의 동적 설계에 관한 연구
전종균,김강부,백재호 한국반도체디스플레이기술학회 2003 한국반도체장비학회지 Vol.2 No.3
It is necessary to design the anti-vibration system of precision machinery for a quality assurance. However, in general, the allowable vibration limit is not well known. In this paper, the vibration criteria for foundation of sensitive machinery is proposed and anti-vibration system is designed by using vibration measurement results of foundation. Also, the finite element analysis is performed to verify the effectiveness of the designed anti-vibration system and to determine the allowable dynamic loads of precision measuring system. The results of this study will be helpful for the future design of anti-vibration structures with nano scale measuring system.
차세대 반도체 FAB의 동적 구조 설계를 위한 PC형 격자보 구조물의 동적 특성 평가
전종균,김강부,손성완,이홍기 한국반도체디스플레이기술학회 2004 반도체디스플레이기술학회지 Vol.3 No.4
In the design stage of high precision manufacturing/inspection FAB facilities, it is necessary to investigate the allowable vibration limits of high precision equipments and to study structural dynamic characteristics of C/R and Sub-structure in order to provide structural vibration criteria to satisfy these allowable limits. The goal of this study is to investigate the dynamic characteristics of PC-Type mock-up structures designed for next generation TFT-LCD FAB through experiments and analysis procedures. Therefore, in order to provide a proper dynamic structural design for high precision manufacturing/inspection work process, these allowable limits must be satisfied.
전종균,김강부,김현식 선문대학교 1998 공과대학논문집 Vol.1 No.1
본 연구에서는 점탄성 감쇠기중에 고무를 이용한 Bracing Damper를 제작하여 고무의 형상과 종류 에 따른 성능시험을 하였다. 댐퍼의 모델을 감쇠재료의 형상에 따라 단일고무(T-type)와 Steel Plate이 고무에 적층된(Plate-type) 재료로 구분하여 비교하였다. 감쇠재료인 고무는 NR과 PNR 2가지로 분류하였다. 만능재료 시 험기로 측정된 결과값으로부터 hysteresis 곡선을 작성하여, 시편의 분류에 따른 진동저감 효과를 비교하였다. Performance tests of bracing damper made with rubber were carried out in this study according to types and kinds of the rubber used. T-type(rubber only) and Plate-type(steel plate-reinforced rubber) were considered for comparing damper models. Two kinds of rubber - NR and PNR - were used as damping materials, Hysterisis curves obtained with Universal Testing Machine were discussed regarding the vibrational effects of the testing specimens.
전종균,김강부,김현식 선문대학교 ·중소기업기술지원연구소 1999 선문공대 연구/기술 논문집 Vol.4 No.1
본 연구에서는 공작기계의 이상상태 감시 및 진단 기법을 기술하였다. 특히, 주요 진단부를 스핀들과 이송축으로 선정하여 각 신호를 가속도, 회전오차, 이송속도, 부하, 온도 등으로 종류별로 측정하였다. 또한, 시편을 1mm와 4mrn로 절삭하여 측정한 신호를 비교하였고 공작기계 감시 및 진단 시스템을 구축하기 위한 기본적인 장치구성을 정립하였다. Monitoring and diagnosis technique of abnormal states in machine tool was studied. Especially, a spindle and feed-axis were selected as a main diagnosis part, and acceleration, rotational gap, feed speed, load capacity, and temperature were measured. Specimens were examined by cutting in 1mm and 4mm to compare the signals with each other. Basic experimental apparatus was established for monitoring and diagnosis system of machine tool.
고정밀 장비의 진동허용규제치에 대한 시간 및 주파수 영역에서 나타나는 불일치 문제에 관한 연구
이홍기,김강부,백재호 한국반도체디스플레이기술학회 2002 반도체디스플레이기술학회지 Vol.1 No.1
Modem technology depends on the reliability of extremely high precision equipments. In the production of semiconductor wafer, optical and electron microscopes, ion-beam, laser device must maintain their alignments within a sub-micrometer. This equipment requires a vibration free environment to provide its proper function. Therefore, this high technology equipments require very strict environmental vibration criteria because it is used as basic data for the design of building structure and structural dynamics of equipment. In this paper, the new approach is proposed to investigate the mismatch problem of time and frequency domain for vibration criteria of sensitive equipment. The proposed approach is based on a vibration measurement data and a relative transfer function which can be obtained by experiment or analysis.
초정밀 측정/가공 장비의 외부진동에 대한 상대변위의 추출과 진동성능 평가에 관한 연구
전종균,엄호성,김강부,원영재 한국소음진동공학회 2002 한국소음진동공학회 논문집 Vol.12 No.1
Generally, there are laser operating equipments( aligner, stepper) and electronic microscope( SEM, TEM) as a high precision manufacturing and inspection equipment in semiconductor production companies, precision examination and measuring laboratories. Mostly, these equipments are characterized by projection and target part. The relative displacements between projection and target part are dominant roles in vibrational problem in these precision equipments. These relative displacements are determined by the position of incoming vibration and the difference of vibration response in projection and target part. In this study, the allowable vibrational limits are suggested and the vibrational reduction plans are proposed by measurement and analysis of vibration phenomenon in the Clean Room in PDP(plasma display panel) production building. The vibration performance is