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Mn-Zn-Fe-O 금속타깃을 이용한 수직자기기록디스크의 하지연자성층용 Mn-Zn ferrite 박막제작
공석현,김경환,Kong, Sok-Hyun,Kim, Kyung-Hwan 한국전기전자재료학회 2006 전기전자재료학회논문지 Vol.19 No.9
In order to attain high-rate deposition of Mn-Zn ferrite thin film for soft magnetic underlayer in perpendicular magnetic recording media, a reactive sputtering using powder-metal targets under the mixture gas of Ar and $O_{2}$ was performed. It was succeeded that Mn-Zn ferrite films with (111) crystal orientation were deposited on Pt(111) underlayer without any annealing process. The film revealed 3.4 kG of 4 ${\pi}Ms$, 70 Oe of coercivity. The deposition rate of the new method was 16 times as high as that of the conventional method using ferrite target.
수직자기기록매체용 Fe-Co-B/M 하지연자성층의 미세결정구조 및 자기특성
공석현,손인환,금민종,최형욱,박용서,김경환 한국전기전자재료학회 2004 전기전자재료학회논문지 Vol.17 No.8
It is necessary to develop soft magnetic layer with high saturation magnetization 4 $\pi{M}_s$ and in-plane magnetic anisotropy field Hk for soft magnetic underlayer of perpendicular magnetic recording media with high signal to noise ratio. Fe-Co-B layer with high 4 $\pi$Ms of about 23 kG deposited on Ni-Fe and Ni-Fe/Si seedlayer exhibited very high in-plane magnetic anisotropy filed Hk of about 280 and 380 Oe, respectively, In-plane XRD studies clarified that the lattice spacing of planes along the easy axis direction was longer than that along the hard axis direction in the Fe-Co-B layers with high Hk. These results indicate that high Hk of Fe-Co-B/Ni-Fe and Fe-Co-B/[Ni-Fe/si] layers were resulted from magnetoelastic anisotropy owing to a residual stress. Moreover, the high Hk in the Fe-Co-B/Ni-Fe layer was maintained until 30$0^{\circ}C$ annealing temperature.
수소 분위기 중 열처리법을 이용한 고자기이방성 L<sub>10</sub> FePt 박막 제작
공석현,김경환,Kong, Sok-Hyun,Kim, Kyung-Hwan 한국진공학회 2007 Applied Science and Convergence Technology Vol.16 No.5
Glass disk상에 대향 타겟식 스퍼터링(Facing Target Sputtering) 방식을 이용하여 $0.1\;{\AA}/s$의 낮은 증착속도로 증착시킬 경우 b.c.c. (100)면 우선배향성을 확인하였으며, 그 위에 Pt박막을 증착시킨 경우 hetero-epitaxial 성장에 의해 Pt박막이(111)의 조밀면이 아닌 (100)면이 우선배향 되었다. 이렇게 형성된 Fe (100)/Pt (100) 이층막(두께 각 3 nm)을 $600\;^{\circ}C$ 수소분위기에서 열처리함에 의해 막전체에 걸쳐서 f.c.t. (00n)면을 형성시키는 데 성공하고, 또한 Fe (100)면 상에 Pt 박막을 증착시키는 동안 열처리를 하고 증착 이후 수소분위기에서 열처리함에 의해 열처리 시간 및 온도를 크게 낮출 수 있음을 확인하였다. Fe thin films exhibited (100) preferential orientation when they were deposited at low deposition rate of $0.1{\AA}/s$ on glass substrates by using facing target sputtering system. The (100) oriented Fe layer induces (100) orientation of Pt layer deposited on it owing to hetero-epitaxial growth. After annealing at $600^{\circ}C$ in $H_2$ atmosphere, FePt films exhibited f.c.t. (001) texture in the whole film caused by inter-diffusion between atoms. We have also confirmed that the homogeneously inter-diffused compositional modulation in the film after the annealing process. Furthermore, annealing process in $Ar+H_2$ atmosphere at $400^{\circ}C$ during Pt deposition was effective for attaining Pt (100) texture. The annealing process during Pt deposition also induced in low annealing temperature and decreased annealing time for attaining the FePt f.c.t. (001) structure.
공석현,김경환 한국물리학회 2008 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.53 No.5
A Fe-Co-B layer with a high 4Ms of 23 kG was investigated for a low-noise-type soft magnetic underlayer of perpendicular magnetic recording media. A Ni-Fe seedlayer was effective in attaining a high Hk and a low Hc for the Fe-Co-B layers. The origin of high Hk in the Fe-Co-B/Ni-Fe layers was magnetoelastic anisotropy due to residual stress. The high Hk exhibited a relatively strong durability in the annealing process. Furthermore, the Fe-Co-B/Ni-Fe double layer with a high Hk exhibited a single domain pattern suited for a low-noise soft magnetic underlayer.
수직자기기록매체용 Co-Cr 박막의 자기적 특성 개선에 관한 연구
공석현,금민종,최형욱,최동진,김경환,손인환 한국전기전자재료학회 2000 전기전자재료학회논문지 Vol.13 No.5
We prepared Co-Cr thin film for perpendicular magnetic recording media with facing targets sputtering system(FTS system) which can deposit a high quality thin film in plasma-free state and wide range of working pressure. The effect of sputtering conditions(argon gas pressure and substrate temperature) on the magnetic and the crystallographic characteristic of Co-Cr thin film was investigated. And the variation of perpendicular coercivity with the variation of film thickness was studied. As a result we obtained the high perpendicular coercivity of 1900Oe and the good dispersion angle of c-axis($\Delta$$\theta$$_{50}$) of 5$^{\circ}$on the film thickness of 100nm for the promising recording layer of perpendicular magnetic recording media.c recording media.a.