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Infrared Focal Plane Array 용 MEMS 구조체 개발
曺星穆(Seong M. Cho),梁佑碩(Woo Seok Yang),柳浩駿(Ho Jun Ryu),田尙勳(Sang Hoon Cheon),兪炳坤(Byoung-Gon Yu),崔昌億(Chang Auck Choi) 대한전기학회 2007 전기학회논문지 Vol.56 No.8
A micromachined sensor part for an infrared focal plane array has been designed and fabricated. Amorphous silicon was adapted as a sensing material, and silicon nitride was used as a membrane material. To get a good efficiency of infrared absorption, the sensor was made as a λ/4 cavity structure. All the processes were done in 0.5 ㎛ iMEMS fab. in the Electronics and Telecommunication Research Institute (ETRI). The processed MEMS sensor structure had a small membrane deflection less than 0.3 ㎛. This excellent deflection property can be attributed to the rigorous balancing of the stresses of individual layers. The efficiency of infrared absorption was more than 75% in the wavelength range 8 - 14 ㎛.