공중부양 열전대의 설계 및 제작

김정훈(Jung-Hoon Kim),김용준(Yong-Jun Kim) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.5

Thermopile is widely used in a micro heat flux sensor, a thermo-generator, and a micro calorimeter. Conventional MEMS-type thermopiles are realized directly on a silicon wafer, which results in increased heat capacity. This is obviously not good for a highly sensitive thermopile. In this study, an elevated thermopile has been realized with an elevated structure on a silicon substrate to reduce parasitic heat loss. The elevated thermopile arrays are composed of 20 couples, and sensitivity was <SUP>***</SUP> ㎷/K. The sensitivity is a higher value than that of general thermopiles.

열전대열 적외선 센서 기반 인체 감지 거리가 확장된 판정 모듈 설계

강건일(Keonil Kang),남상원(Sang-Won Nam) 대한전자공학회 2018 전자공학회논문지 Vol.55 No.7

열전대열 적외선(thermopile infrared) 센서는 인체 감지 성능이 우수한 반면에, 주변에서 발생된 열 변화에 민감하게 반응하여 감지 오차와 편차가 크고, 초전형 적외선(pyroelectric infrared) 센서에 비하여 최대 감지 거리가 짧은 단점이 있다. 이러한 문제점을 보완하고 인체 감지 거리를 확장하기 위해서는, 주변 온도 변화로 인한 인체 감지 오차와 편차를 줄이기 위한 인체감지 판정기 모듈(decision module) 설계가 요구된다. 본 논문은 열전대열 적외선 감지 센서와 추가된 주변 환경 열 감지 센서(thermistor circuit)를 이용하고 적응 필터를 적용하여 인체 감지 거리를 확장시킨 DSP 기반 판정기 모듈 설계를 제안한다. 구체적으로, 주변 환경 열 잡음이 열전대열 적외선 감지 센서 출력에 중첩되어 있어서, 주변 환경 열 잡음 정보와 적응 필터를 적용하여 필터 출력을 인체 감지 판정 신호로 변환하여 감지 여부를 판정함으로써, 감지 판정 오차와 편차 범위를 실시간으로 줄일 수 있고 인체 감지 거리가 확장된다. 제안된 모듈은 시제품 보드로 제작되었고, 인체 감지 거리 성능을 비교하기 위해, 범용 8-bit CPU를 이용한 판정기 회로로 구성된 기존 모듈과 동일 환경 조건에서 비교 실험한 결과, 제안된 DSP 기반 판정기 모듈로 구성된 시제품 보드의 인체 감지 거리가 2배 이상 확장(최대 7.0 m 거리)된 감지 성능을 보였다. Thermopile infrared sensors yield good human-body detection performance, while working in shorter detection distance and showing higher temperature sensitivity, compared with pyroelectric infrared sensors. To solve such a short-detectiondistance problem, design of a decision module for thermopile infrared sensors has been required to minimize in real-time the human-body detection error and its tolerance for achieving the extended detection distance. In this paper, design of a thermopile-infrared-sensor based decision module with extended human-body detection distance is proposed, whereby the thermopile infrared sensor module is utilized along with a thermistor circuit for background thermal information and a high-performance DSP is employed for adaptive filtering in real-time. Specifically, the proposed decision module reduces the threshold level for decision of human-body detection by utilizing the adaptive filter and the background thermal noise from the thermistor circuit, finally transforming the thermopile infrared sensor signal into a decision signal for human-body detection. Also, the DSP based prototype board is made to test the infrared human-body detection perfomance of the designed decision module. Finally, it is verified that the human-body detection distance, tested under the same test conditions as the conventional 8-bit CPU based decision module sensor, can be further extended up to 7.0 meters, about 2 times longer by the proposed DSP decision module.

단결정 실리콘 써모파일을 이용한 접촉형 온도센서 개발

이영태 ( Young Tae Lee ),이유나 ( You Na Lee ),이왕훈 ( Wang Hoon Lee ) 한국센서학회 2013 센서학회지 Vol.22 No.5

In this paper, we developed contact type temperature sensor with single crystal silicon strip thermopile. This sensor consists of 15 ptype single crystal silicon strips, 17 n-types and contact electrodes on silicon dioxide silicon membrane. The result of electromotive force measuring showed very good characteristic as 15.18 mV/℃ when temperature difference between the two ends of the thermopile occurs by applying thermal contact on the thermopile which was fabricated with silicon strip of 200 μm length, 20 μm width, 1 μm thickness.

Thermopile을 이용한 micro heat flux sensor의 제작 및 평가

김정훈(Jung-Hoon Kim),김범석(Bum Seok Kim),조형희(Hyung Hee Cho),김용준(Yong-Jun Kim) 한국정밀공학회 2005 한국정밀공학회 학술발표대회 논문집 Vol.2005 No.5월

Simplified field measurement and verification of global solar transmittance for glazing samples under natural clear-sky conditions

Song, Suwon,Haberl, Jeff S. Elsevier 2017 SOLAR ENERGY -PHOENIX ARIZONA THEN NEW YORK- Vol.155 No.-

<P><B>Abstract</B></P> <P>This paper presents the results of an experimental study to measure and verify on-site global solar transmittance as a function of varying angles of incidence for glazing samples under natural clear-sky conditions, including: single-pane clear, double-pane clear, and double-pane low-e glazing. Field measurements were implemented using a silicon photodiode sensor and two thermopile-type pyranometers based on an easily-assembled test box with sample glazing. Measurement results were then compared to the published data (i.e., Tsol values in the WINDOW libraries). The results indicate that silicon photodiode sensors can be used to measure and verify direct solar transmittance within an acceptable range of accuracy. However, the global (i.e., direct and diffuse) solar transmittance measured by the thermopile-type sensors was significantly higher than the Tsol values from the WINDOW program. As a result, it is recommended that such field measurements could be used to verify the on-site direct and global solar transmittance of as-built glazing since the WINDOW program currently only accounts for direct (i.e., beam) solar radiation in the reference solar spectrum (i.e., ASTM E891).</P>

The Effect of Ti Adhesion Layer on the Thermoelectric Noise of a High Resolution Thermopile for Nanowatt Heat Flux Sensor

남성기,이선규 한국정밀공학회 2014 International Journal of Precision Engineering and Vol.15 No.11

The effect of Ti adhesion layer on the thermoelectric noise of Microelectromechanical system (MEMS) thermopile sensor isinvestigated in this study. Although the adhesion layer does not affect the thermoelectric voltage through the Seebeck effect, it caninfluence the thermoelectric noise. Two kinds of samples are prepared, both with and without Ti adhesion layers between the contactjunctions of thermopile which are patterned with the 30-array of Au and Cr (Gold-chromium). The Ti layer is used to provide adhesionto the gold film. The surface contact resistance is evaluated by the geometric resistance obtained from a FEM model. Theseexperiments show that the adhesion contact thermopile results in total resistance of 32.64 kΩ and noise amplitude of 313 μV, whereasthe direct contact thermopile results in 24.49 kΩ and 187 μV, respectively. The surface of the contact junction are inspected withscanning electron microscopy(SEM), and atomic force microscopy(AFM) to investigate how the Ti adhesion layer affects theincrement of the surface contact resistance. Furthermore, a heat flux sensor fabricated with the direct contact junctions of thethermopile achieves sensitivity of 62.9 mV/nW and resolution of 1 nW.

Thermopile sensor with SOI-baaed float membrane and its output circuit

Lee, Sung Jun,Lee, Yun Hi,Suh, Sang Hi,Kim, Tae Yoon,Kim, Chul Ju,Ju, Byeong Kwon 한국센서학회 2002 센서학회지 Vol.11 No.5

In this study, we fabricated thermopile infrared sensor with floating membrane structure. Floating membrane was formed by SOI(Silicon On Insulator) structure. In SOI structure, silicon dioxide layer between top silicon layer and bottom silicon substrate was etched by HF solution, then membrane was floated over substrate. After membrane was floated, thermopile pattern was formed on membrane. By insertion of SOI technology, we could obtain thermal isolation structure easily and passivation process for sensor pattern protection was not required during fabrication process. Then, the amplifier circuit for thermopile sensor was fabricated by using 1.5㎛ CMOS process. The voltage gain of fabricated amplifier was about two hundred.

열전대열 적외선 센서를 적용한 인체 감지 거리 확장 모듈 설계

강건일,남상원 대한전자공학회 2018 전자공학회논문지 Vol.55 No.2

Infrared body detection sensor modules, consisting of pyroelectric infrared sensors, amplifiers, and comparators, have been used to classify the body from objects in automatic machines. Among them, pyroelectric infrared (PIR) sensors has some problems such as difficulty in detecting a standing body and generation of wrong signals from the refracted visible ray. However, the recently introduced thermopile infrared (TIR) sensor, detecting signals of wave-length 6um∼13um through a silicon filter in it, can be utilized to detect non-moving as well as moving human bodies without generating unwanted infrared signals from the refracted visible ray. But, its detection range is shorter than that of PIR and can be affected by the environmental temperature. This paper proposes a thermopile infrared sensor module with extended human-body detection distance by employing the extended amplifier and the temperature compensated circuit. Also, a prototype board made is tested to verify the extended distance in detecting the human body. Consequently, it is verified that the human-body detection distance can be increased up to 3.0 meters, about 3 times than commercial modules. 일반적인 자동제어 기계 장치 등에 사용되고 있는 적외선 인체 감지 센서 모듈은 초전형 적외선 (pyroelectric infrared) 센서, 증폭기, 그리고 비교기로 구성되어 있으며 인체와 물체의 구분 용도로 사용되고 있다. 특히, 초전형 적외선 센서는 정지된인체로부터 적외선 감지를 못하고, 가시광선의 흔들림과 굴절된 빛에 오동작 감지 신호가 발생하는 문제가 있다. 최근의 열전대열 적외선 (thermopile infrared) 센서는 실리콘 필터를 통해 6um∼13um 적외선 파장 대역 신호를 감지할 수 있어서 가시광선 영향이 최소화되고, 정지된 인체로부터도 적외선을 감지할 수 있다. 그러나, 열전대열 적외선 센서에서는 초전형 적외선 센서와 비교하여 인체 감지 거리가 상대적으로 짧고, 주변 온도 감지 출력이 적외선 감지 신호에 가중되어 출력되는 문제가 있다. 본 논문은 인체 감지 거리가 확장된 열전대열 적외선 센서 모듈 회로를 제안한다. 제안된 감지 거리 확장 모듈은 고 이득증폭기와 온도 보상 회로의 2단으로 구성되어 있다. 제안 모듈은 시제품 보드로 제작 및 실험되었고, 최근의 상업용 열전대열적외선 센서 모듈과 비교해도 감지 거리가 약 3 배 확장되어 3.0m 거리에서도 안정적인 인체 감지 성능을 보였다

마이크로 히터에 의한 열전쌍의 역기전력 발생에 대한 연구

남성기(Sung-Ki Nam),이선규(Sun-Kyu Lee) 한국정밀공학회 2013 한국정밀공학회 학술발표대회 논문집 Vol.2013 No.5월

Thermoelectric Characteristics of the Thermopile Modules Processed with Bi₂Te₃ and Sb₂Te₃ Films for MEMS Sensors

Min-Young Kim,Jung-Yeol Choi,Tae-Sung Oh 한국표면공학회 2008 한국표면공학회 학술발표회 초록집 Vol.2008 No.-