나노메니퓰레이터를 이용한 나노선의 특성평가

윤상원,서종현,안재평,성태연,이건배,Yoon, Sang-Won,Seo, Jong-Hyun,Ahn, Jae-Pyoung,Seong, Tae-Yeon,Lee, Kon-Bae 한국분말야금학회 2009 한국분말재료학회지 (KPMI) Vol.16 No.2

The combination of focused ion beam (FIB) and 4 point probe nanomanipulator could make various nano manufacturing and electrical measurements possible. In this study, we manufactured individual ZnO nanowire devices and measured those electrical properties. In addition, tensile experiments of metallic Au and Pd nanowires was performed by the same directional alignment of two nanomanipulators and a nanowire. It was confirmed from I-V curves that Ohmic contact is formed between electrodes and nanomanipulators, which is able to directly measure the electrical properties of a nanowire itself. In the mechanical tensile test, Au and Pd nanowires showed a totally different fracture behavior except the realignment from <110> to <002>. The deformation until the fracture was governed by twin for Au and by slip for Pd nanowires, respectively. The crystallographic relationship and fracture mechanism was discussed by TEM observations. FIB와 나노메니퓰레이터를 이용한 다양한 nano manufacturing을 통해 단일 나노선 소자제작 및 평가가 가능하였으며 또한 나노물질 자체의 전기적, 기계적 특성 평가를 수행할 수 있었다. 나노메니퓰레이터를 나노선에 직접 접촉시켜 전기적 특성을 평가하는 기술은 STA 등과 함께 사용될 때 높은 신뢰도를 갖는 신호를 얻을 수 있었다. 특히, 이를 이용한 나노 소재 특성 평가기술은 소자제작 시간을 단축시킬 수 있고 패턴닝으로부터 화학적 오염을 줄일 수 있는 장점을 갖고 있었다. 또한 FIB와 나노메니퓰레이터를 적절히 이용하면 나노인장시험기로서 활용이 가능하였으며 나노선의 기계적 특성을 본격적으로 평가할 수 있었다. 본 연구의 나노인장시험으로부터 얻은 인장실험 및 TEM분석으로부터 Au 및 Pd 나노선의 인장 및 파괴거동을 직접적으로 관찰할 수 있었다. Au 나노선은 인장초기에 {111}<112> 쌍정이 생성되고 나노선의 직경이 감소하다가 더 이상 인장응력을 수용할 수 없게되면 <110> 축으로부터 <002> 방향으로 재배열하는 방식으로 네킹이 형성되며 최종적으로 결정축 재배열 이후에는 슬립에 의한 파괴가 진행된다. Pd 나노선의 경우에는 Au와는 전혀 다른 파괴거동을 보였다. 먼저 네킹없이 <002> 축으로의 재배열 현상이 관찰되며 이후 cross-slip에 의한 변형을 하였다. 두 나노선 모두 인장 응력이 가해지면 네킹 부분을 중심으로 한 부분에서만 변형이 일어나며 다른 부분에서는 아무런 변형을 찾아 볼 수 없었다.

A Study on Field Emission Characteristics of Planar Graphene Layers Obtained from a Highly Oriented Pyrolyzed Graphite Block

Lee, SeokWoo,Lee, Seung S,Yang, Eui-Hyeok Springer 2009 NANOSCALE RESEARCH LETTERS Vol.4 No.10

<P>This paper describes an experimental study on field emission characteristics of individual graphene layers for vacuum nanoelectronics. Graphene layers were prepared by mechanical exfoliation from a highly oriented pyrolyzed graphite block and placed on an insulating substrate, with the resulting field emission behavior investigated using a nanomanipulator operating inside a scanning electron microscope. A pair of tungsten tips controlled by the nanomanipulator enabled electric connection with the graphene layers without postfabrication. The maximum emitted current from the graphene layers was 170 nA and the turn-on voltage was 12.1 V.</P>

Transmission Electron Microscopy Sample Preparation of Ge₂Sb₂Te₅ Nanowire Using Electron Beam

Lee, Hee-Sun,Lee, Jun-Young,Yeo, Jong-Souk Korean Society of Microscopy 2015 Applied microscopy Vol.45 No.4

A simple and novel transmission electron microscopy (TEM) sample preparation method for phase change nanowire is investigated. A $Ge_2Sb_2Te_5$ (GST) nanowire TEM sample was meticulously prepared using nanomanipulator and gas injection system in a field emission scanning electron microscopy for efficient and accurate TEM analysis. The process can minimize the damage during the TEM sample preparation of the nanowires, thus enabling the crystallographic analysis of as-grown GST nanowires without unexpected phase transition caused by e-beam heating.

Advanced Methodologies for Manipulating Nanoscale Features in Focused Ion Beam

Kim, Yang-Hee,Seo, Jong-Hyun,Lee, Ji Yeong,Ahn, Jae-Pyoung Korean Society of Microscopy 2015 Applied microscopy Vol.45 No.4

Nanomanipulators installed in focused ion beam (FIB), which is used in the lift-out of lamella when preparing transmission electron microscopy specimens, have recently been employed for electrical resistance measurements, tensile and compression tests, and in situ reactions. During the pick-up process of a single nanowire (NW), there are crucial problems such as Pt, C and Ga contaminations, damage by ion beam, and adhesion force by electrostatic attraction and residual solvent. On the other hand, many empirical techniques should be considered for successful pick-up process, because NWs have the diverse size, shape, and angle on the growth substrate. The most important one in the in-situ precedence, therefore, is to select the optimum pick-up process of a single NW. Here we provide the advanced methodologies when manipulating NWs for in-situ mechanical and electrical measurements in FIB.

AFM as a Robot for Automated Nanohandling

Sergej Fatikow,Florian Krohs 제어로봇시스템학회 2010 제어로봇시스템학회 국제학술대회 논문집 Vol.2010 No.10

Besides its ability of high resolution imaging, the Atomic Force Microscope (AFM) has been recognized as a valuable instrument for manipulation at the nanoscale within the last years. Promising applications of such AFMbased nanorobotic manipulation are e.g. the characterization of nanoentities such as CNTs and DNA or the prototypical fabrication of nanoscale components, devices, and systems based on such nanoobjects. One major problem that arises when the AFM is used as a robot for nanomanipulation is often the relativly low throughput induced by the sequential character of the AFM. Automation has proven to be a suitable means to increase the throughput of such AFM-based nanomanipulations and to achieve more reliable results. This paper discusses the usage of the AFM as a robot for nanohandling in general and presents our latest results on automated nanomanipulation. The handling of CNTs on HOPG substrate as an example of the manipulation of single nanoentities and our strategies for automated nanohandling are dealt with. Moreover, the feasibility of AFM-based nanostructuring for the development of components for biosensors and the combination of an AFM with an SEM are demonstrated.

Fuzzy PID Control and Simulation of Piezoelectric Ceramic Nanomanipulation System

Dongjie Li,Li Zhang,Yue Zhang,Jinyu Wang 보안공학연구지원센터 2013 International Journal of Multimedia and Ubiquitous Vol.8 No.5

Nanomanipulation and Nanomanufacturing based on Ion Trapping and Scanning Probe Microscopy(SPM)

김동환,원시태,맹희영,Ekinci, K. L. 한국공작기계학회 2004 한국공작기계학회 춘계학술대회논문집 Vol.2004 No.-

Development of a versatile nanomanipulation tool is an overarching theme in nanotechnology. Such a tool will likely revolutionize the field given that it will enable fabrication and operation of a wealth of interesting nanodevices. This study seeks funding to create a novel nanomanipulation system with the ultimate goal of using this system for nanomanufacturing at the molecular level. The proposed design differs from existing approaches. It is based on a nanoscale ion trap integrated to a scanning probe microscope (SPM) tip. In this design, molecules to be assembled will be ionized and collected in the nanoscale ion trap all in an ultra high vacuum (UHV) environment. Once filled with the molecular ions, the nanoscale ion trap-SPM tip will be moved on a substrate surface using scanning probe microscopy techniques. The molecular ions will be placed at their precise locations on the surface. By virtue of the SPM, the devices that are being nanomanufactured will be imaged in real time as the molecular assembly process is carried out. In the later stages, automation of arrays of these nanomanipulators will be developed.

Electrical Characterization of Electronic Materials Using FIB-assisted Nanomanipulators

Roh, Jae-Hong,You, Yil-Hwan,Ahn, Jae-Pyeong,Hwang, Jinha Korean Society of Microscopy 2012 Applied microscopy Vol.42 No.4

Focused Ion Beam (FIB) systems have incorporated versatile nanomanipulators with inherent sophisticated machining capability to characterize the electrical properties of highly miniature components of electronic devices. Carbon fibers were chosen as a model system to test the applicability of nanomanipulators to microscale electronic materials, with special emphasis on the direct current current-voltage characterizations in terms of electrode configuration. The presence of contact resistance affects the electrical characterization. This resistance originates from either i) the so-called "spreading resistance" due to the geometrical constriction near the electrode - material interface or ii) resistive surface layers. An appropriate electrode strategy is proposed herein for the use of FIB-based manipulators.

Qualitative study of nanocluster positioning process: Planar molecular dynamics simulations

S.H. Mahboobi,A. Meghdari,N. Jalili,F. Amiri 한국물리학회 2009 Current Applied Physics Vol.9 No.5

One of the key factors in the assembly of nanoclusters is the precise positioning of them by a manipulation system. Currently the size of clusters used as building blocks is shrinking down to a few nanometers. In such cases, the particle nature of matter plays an important role in the manipulator/cluster/substrate interactions. Having a deeper insight to the aforementioned nano-scale interactions is crucial for prediction and understanding of the behavior of nanoclusters during the positioning process. In the present research, 2D molecular dynamics simulations have been used to investigate such behaviors. Performing planar simulations can provide a fairly acceptable qualitative tool for our purpose while the computation time is greatly reduced in comparison to 3D simulations. The system consists of a tip, cluster and substrate. The focus of the present research is on ultra-fine metallic nanoclusters. To perform this research, Nose–Hoover dynamics and Sutton–Chen interatomic potential will be used to investigate the behavior of the above system which is made from different transition metals. The effects of material type, tip form and manipulation strategy on the success of the process have been investigated by planar molecular dynamics. Such qualitative simulation studies can evaluate the chance of success of a certain nanopositioning scenario regarding different working conditions before consuming large-scale computation time or high experimental expenses.