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레이저빔 가공 인자에 따른 구리도금 미세 패터닝 특성 연구
신홍식,Shin, Hong Shik 한국교통대학교 융복합기술연구소 2015 융ㆍ복합기술연구소 논문집 Vol.5 No.2
This paper proposes a fabrication process of deposited layer with micro patterns that uses a combination of a pulsed laser beam machining and an electrodeposition. This process consists of the electrodeposition and the laser beam machining. The deposited layer on metal can be selectively eliminated by laser ablation. As a result, the deposited layer with micro patterns can be fabricated without a mask. The characteristics of the deposited layer on stainless steel were investigated according to the average power and marking speed in the pulsed laser beam machining. The optimal laser beam conditions for precise micro patterning of the deposited layer were determined. Finally, the deposited copper layer with micro text was successfully fabricated by the pulsed laser beam machining.
신홍식,Shin, Hong Shik 한국교통대학교 융복합기술연구소 2014 융ㆍ복합기술연구소 논문집 Vol.4 No.2
Micro fabrication technologies of aluminium have been required to satisfy many demands in technology fields. Pulsed laser beam machining can be an alternative method to accomplish the micro machining of aluminium. Pulsed laser beam can be applied to micro machining such as micro drilling and milling. Using pulsed laser beam, the machining characteristics of aluminium in micro drilling and milling were investigated according to average power, repetition rate, moving speed of spot. The laser beam machining with the optimal conditions can achieve precise micro figures. As a result, micro pattern, text and structures on aluminium surface was successfully fabricated by pulsed laser beam machining.
Fabrication of Tungsten Micro Needle Arrays Using Laser Beam Machining
박종욱(Jong Wuk Park),김한(Haan Kim),박종훈(Jong Hun Park) Korean Society for Precision Engineering 2021 한국정밀공학회지 Vol.38 No.5
Micro needle arrays have been widely used within medical contexts, such as for drug delivery and nervous electrodes, and its fabrication methods have attracted attention recently. This paper describes a novel fabrication method for micro needle arrays on a tungsten metal plate using only laser beam machining. Tungsten material was ablated as combining laser beam scanning path to control needle structure. Overlapping laser beams from the combined scanning path causes thermal accumulation phenomena which removes the material. In this paper, controlling laser scanning path (Line Interval, Line Space, Number of Lines) and machining conditions (Power, Number of Scan), and the changing length and pitch of the micro needles were measured through SEM. Moreover, the piercing force for application in drug delivery and nervous electrodes was measured with a load cell system.
초음파 진동과 레이저 후면 에칭을 통한 유리 구멍 가공
김혜미(Hye Mi Kim),박민수(Min Soo Park) Korean Society for Precision Engineering 2014 한국정밀공학회지 Vol.31 No.1
Laser beam machining has been known as efficient for glass micromachining. It is usually used the ultra-short pulsed laser which is time-consuming and uneconomic process. In order to use economic and powerful long pulsed laser, indirect processing called laser-induced backside wet etching (LIBWE) is good alternative method. In this paper, micromachining of glass using Nd:YAG laser with nanosecond pulsed beam has been attempted. In order to improve shape accuracy, combined processing with magnetic stirrer has been widely used. Magnetic stirrer acts to circulate the solution and remove the bubble but it is not suitable for deep hole machining. To get better effect, ultrasonic vibration was applied for improving shape accuracy
최준하(Junha Choi),신영관(Young Gwan Shin),김훈영(Hoon Young Kim),최원석(Wonsuk Choi),김재구(Jae-Gu Kim),장원석(Won-Seok Chang),윤재성(Jae-sung Yoon),조성학(Sung-Hak Cho) Korean Society for Precision Engineering 2020 한국정밀공학회지 Vol.37 No.12
A femtosecond laser is used in various fields such as microscale machining, OLED repair, micro 3D structure fabrication, and eye surgery. Particularly, because of non-thermal property, ablation and ablation threshold are the most representative characteristics of femtosecond laser. The ablation system is accompanied by many optics, stage, or gantry. In the case of the gantry, an ordinary optic system delivers a beam where mirrors and lens are required. If the gantry moves to the sample, external stimulation such as vibration will occur. Vibration has an influence on optics such as transforming beam path and becomes an error that decreases accuracy, precision, and spatial resolution. Generally, Fiber Optic Beam Delivery System (FOBDS) is used to solve this issue. But in the case of the femtosecond laser, FOBDS is incompatible. Recently, another FOBDS model that is compatible with the femtosecond laser has been developed. In this paper, the ablation threshold was obtained by FOBDS and femtosecond laser. The results present a possibility of ablation without external stimulation.
김한,박종욱 한국기계가공학회 2022 한국기계가공학회지 Vol.21 No.4
Amorphous alloys exhibit excellent mechanical properties; therefore, application technology development isbeing attempted in various fields. However, industrial use of application technology is limited owing to thelimitations in fabrication. In this study, micropattern fabrication of an amorphous alloy was conducted using laserbeam machining. Although microhole fabrication is possible without the deformation of the amorphous phasethrough nanosecond pulsed laser beam machining, there are limitations in the generation of recast layers andspatters. In cover plate laser beam machining (c-LBM), a cover plate is used to reduce the thermal deformationand processing area. Therefore, it is possible to fabricate holes at the level of several micrometers. In this study,it was confirmed that recast layers are hardly generated in c-LBM. Furthermore, square-shaped micropatternswere successfully fabricated using c-LBM.
Fabrication of Flexible Base Micro-pin Array and Wall Attachment Application
Jong Wuk Park 한국정밀공학회 2020 International Journal of Precision Engineering and Vol.21 No.5
Wall attachment mechanisms for robot have attracted great attention. In this study, we present a novel fabrication method forfl exible micro-pin array adapting to various surface profi les. The fabrication process was composed of three steps. First, thestainless steel (AISI304) micro-pin array was fabricated by using laser beam machining. In this process, laser beam machiningwas adopted because it is valuable for machining stainless steel. Dross and recast layers that were generated during lasermachining were used as a material of micro-pin. Second, to eliminate unnecessary area without micro-pin, electrochemicaletching was carried out. In this step, paraffi n wax was coated to protect micro-pin array. It was eliminated by using heat andultrasonic wave vibration after fi nishing electrochemical etching. Lastly, Polydimethylsiloxane (PDMS) as a fl exible base wasformed to etched micro-pin array. As a result, fl exible based micro-pin array was fabricated. To verify attachment applicationon the wall, interlocking force between fl exible micro-pin array and curved rough surface was measured (39.71 mN).