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TDMAT와 TDMAT/$NH_3$ 로 형성한 MOCVD(Metal Organic Chemical Vapor Deposition) Titanium Nitride 박막의 특성
백수현,김장수,박상욱,원석준,장영학,오재응,이현덕,이상인,최진석,Baek, Su-Hyeon,Kim, Jang-Su,Park, Sang-Uk,Won, Seok-Jun,Jang, Yeong-Hak,O, Jae-Eung,Lee, Hyeon-Deok,Lee, Sang-In,Choe, Jin-Seok 한국재료학회 1995 한국재료학회지 Vol.5 No.7
MOCVD(Metal-Organic Chemical Vapor Dposition) TiN 박막을 다양한 온도와 압력에서 tetrakis-dimethyl-amino-titanium(TDMAT (Ti[N($CH_3$)$_2$]$_4$))의 자체 열분해와 NH$_3$와의 반응을 사용하여 형성하였다. 비저항은 박막내의 불순물 함량에 의존하였는데 특히 XPS curve fitting 결과 주요 불순물인 탄소와 산소 같은 불순물들이 박막내에서 다양한 침입형화합물을 만들어 박막의 물리적, 전기적 특성에 영향을 준다는 것을 알았다. Metal-organic source만을 사용하여 TiN을 형성할 경우 지름이 0.5$\mu\textrm{m}$이고 aspect ratio가 3:1인 구멍에서 step coverage가 매우 우수하였으나 NH$_3$를 흘림에 따라 step coverage가 감소하는 것이 SEM으로 확인되었는데 이는 각각의 활성화에너지와 관련된 것으로 보인다. Thin films of titanium nitride are formed using the tetrakis-dimethyl-amino-titanium (TDMAT(Ti[N($CH_3$)$_2$]$_4$)) under various conditions. The formation of TiN films has been obtained from the thermal decomposition of the Ti-precursor and the gas phase reaction between TDMAT and ammonia(NH$_3$). The resistivity of the MOCVD film can be attributed to their impurity. Especially the curve fitting graph of XPS data is revealed that main impurities in the films as carbon and oxygen make various interstitial compounds which has influenced physical and electrical properties of the film. In the contact hole with the aspect ratio of 3:1 and the diameter of 0.5${\mu}{\textrm}{m}$, the SEM morphology shows that the step coverage is more decreased in the films formed y flowing ammonia additionally than the films formed by pyrolysis of TDMAT and the phenomenon is probably related with the activation energy.
문채주(Moon Chae-Joo),곽승훈(Kwak Seung-Hun),장영학(Jang Yeong-Hak),김태곤(Kim Tae-Gon),김의선(Kim Eui-Sun),김태현(Kim Tae-Hyun) 한국태양에너지학회 2010 한국태양에너지학회 논문집 Vol.30 No.6
This study was conducted to estimate the relative performance of modules with changed characteristics due to long term exposure to the outdoor environment, with a specially made test device for simultaneous measurement of real time power output from the photovoltaic array, taking into account the inclined panel, direct irradiation, power being generated, temperature as well as the optimal analysis timing. In terminology description, M is an abbreviation of module and Group A, Group B are 10 modules series connection (1∼10 of M), (11∼20 of M) for each of them respectively. The overall mean voltage difference of M-18 with the lowest power output and M-14 with the highes toutput is -2.13V and it was identifiable that voltage difference was more concentrated to Group B. In addition, in case of M-2 and M -7, M-8, when compared with M-14, the overall mean voltage difference was -0.92V, -1.56 and -0.91V respectively showing the more concentration to Group A. When the temperature of module went up by 1℃, the mean voltage was reduced by 0.35V. For current, Group A was lower than Group B by-0.022A and the ratio of each group was 49.68% and 50.32% respectively, presumably the module with deteriorated properties were more concentrated to Group A relatively. From the comparison of relations with the comprehensive accumulation, M-2, M-7, M-8, M-16 and M-18 were those with deterioration of performance to the worst, there by requiring precision examination. In comparative efficiency, M-14 was the most excellent one as 12.19% while M-18 as 10.53% was identified that its efficiency was comparatively rapidly reduced.
곽승훈(Seung-Hun Kwak),정문선(Moon-Seon Jeong),김상만(Sang-Man Kim),문채주(Chea-Joo Moon),장영학(Yeong-Hak Jang) 전력전자학회 2010 전력전자학술대회 논문집 Vol.2010 No.11
태양광발전시스템에서 PV모듈이나 어레이의 성능특성 및 성능추정이 요구되고 있다. 태양광 발전 모듈은 장기간 사용 시환경 요인 등으로 효율이 나빠지며 어레이의 특정 모듈 효율저하는 전체 발전 전력의 감소를 초래하므로 실시간 감시가 필요하다. 이 논문은 태양광 발전 모듈의 발전 전력을 실시간으로 측정하기 위한 것이다. 모듈의 출력을 실시간으로 측정하기 위해 전압, 전류 측정 회로를 제작하고 온도, 일조량 측정 장치를 제작하여 RS485 통신으로 연결하였다. Visual Studio - Basic .Net(2005)과 NI사의 Measurement Studio를 이용하여 실시간 모니터링 프로그램을 제작하였고, 모듈들 사이의 상대적인 발전 출력을 비교하여 효율 저하가 의심되는 모듈을 실시간으로 탐색하였다. 20개 모듈의 직병렬로 구성된 1㎾ 태양광 발전체에 적용하여 시험한 결과 2개의 모듈에서 성능 저하가 의심되는 결과가 확인되었다.
정문선(Jeong Moon-Seon),문채주(Moon Chae-Joo),정권성(Jeong Gwan-Seong),최만수(Choi Man-Soo),장영학(Jang Yeong-Hak) 한국태양에너지학회 2012 한국태양에너지학회 논문집 Vol.32 No.3
As the wind farms in large scale demand enormous amount of construction cost, minimizing the economic burden is essential and also it is very important Lo measure the wind resources and forecast annual energy production correctly to judge the economic feasibility of the proposed site by way of installing a Met mast at or nearby the site. Wind resources were measured by installing a 80[m] high Met mast at Wangdeung Yeo Island to conduct the research incorporated in this paper and offshore wind farm was designed using WindPRO. Wind farm of 100[㎿] was designed making use of 3 and 4.5[㎿] wind generator at the place selected to compare their annual energy production and capacity factor applying the loss factor of 10[%] and 20[%] respectively to each farm. As a result, 336,599[㎿h] was generated by applying 3[㎿] wind generator while 358,565[㎿h] was produced by 4.5[㎿] wind generator. Difference in the energy production by 3[㎿] generator was 33,660 [㎿h] according to the loss factor with the difference in its capacity factor by 3.8[%]. On the other hand, 23 units of 4.5 [㎿] wind generators showed the difference of annual energy production by 35,857 [㎿h] with 4.0[%] capacity factor difference.