SOI and Its Application to Sensors

Nakamura, Tetsuro 경북대학교 센서기술연구소 1992 센서技術學術大會論文集 Vol.3 No.1

On-cam operation of counter-rotating type hydroelectric unit

Tetsuro Kasai,Makoto Usui,Yoshihiro Nakamura,Toshiaki Kanemoto,Daisuke Tanaka 한국물리학회 2010 Current Applied Physics Vol.10 No.2

To cope with the warming global environments, the authors had proposed the counter-rotating type hydroelectric unit, which is composed of the tandem runners and the peculiar generator with double rotational armatures. This unit can be supplied to various water circumstances, for instance, the traditional large hydropower, the mini/micro hydropower, and the tidal power. The fundamental performances and the flow conditions around the runners have been investigated and the design materials for the runners have been presented. Continuously, this paper discusses the performances at the oncam operation, in the large tidal power station. The model unit was operated while keeping the relative rotational speed constant nT = 900 min-1, namely 60 Hz, irrespective of the hydropower circumstances. The output and the hydraulic efficiency are affected by the blade setting angles of the front and the rear runners. Resultantly, both optimum angles giving the maximum output and/or the maximum efficiency are presented at the various discharges/heads.

Silicon-Wafer Direct Bonding for Single-Crystal Silicon-on-Insulator Transducers and Circuits

정귀상,Chung, Gwiy-Sang,Nakamura, Tetsuro The Korean Sensors Society 1992 센서학회지 Vol.29 No.3

본 논문은 SOI트랜스듀서 및 회로를 위해, Si 직접접합과 M-C국부연마법에 의한 박막SOI구조의 형성 공정을 기술한다. 또한, 이러한 박막SOI의 전기적 및 압저항효과 특성들을 SOI MOSFET와 cantilever빔으로 각각 조사했으며, bulk Si에 상당한다는 것이 확인되었다. 한편, SOI구조를 이용한 두 종류의 압력트랜스듀서를 제작 및 평가했다. SOI구조의 절연층을 압저항의 유전체분리층으로 이용한 압력트랜스듀서의 경우, $-20^{\circ}C$에서 $350^{\circ}C$의 온도범위에 있어서 감도 및 offset전압의 변화는 자각 -0.2% 및 +0.15%이하였다. 한편, 절연층을 etch-stop막으로 이용한 압력트랜스듀서에 있어서의 감도변화를 ${\pm}2.3%$의 표준편차 이내로 제어할 수 있다. 이러한 결과들로부터 개발된 SDB공정으로 제작된 SOI구조는 집적화마이크로트랜스듀서 및 회로개발에 많은 장점을 제공할 것이다. This paper has been described a process technology for the fabrication of Si-on-insulator(SOI) transducers and circuits. The technology utilizes Si-wafer direct bonding(SDB) and mechanical-chemical(M-C) local polishing to create a SOI structure with a high-qualify, uniformly thin layer of single-crystal Si. The electrical and piezoresistive properties of the resultant thin SOI films have been investigated by SOI MOSFET's and cantilever beams, and confirmed comparable to those of bulk Si. Two kinds of pressure transducers using a SOI structure have been proposed. The shifts in sensitivity and offset voltage of the implemented pressure transducers using interfacial $SiO_{2}$ films as the dielectrical isolation layer of piezoresistors were less than -0.2% and +0.15%, respectively, in the temperature range from $-20^{\circ}C$ to $+350^{\circ}C$. In the case of pressure transducers using interfacial $SiO_{2}$ films as an etch-stop layer during the fabrication of thin Si membranes, the pressure sensitivity variation can be controlled to within a standard deviation of ${\pm}2.3%$ from wafer to wafer. From these results, the developed SDB process and the resultant SOI films will offer significant advantages in the fabrication of integrated microtransducers and circuits.

단결정 SOI트랜스듀서 및 회로를 위한 Si 직접접합

정귀상,( Gwiy Sang Chung,Tetsuro Nakamura ) 한국센서학회 1992 센서학회지 Vol.1 No.1

This paper has been described a process technology for the fabrication of Si-on-insulator(SOI) transducers and circuits. The technology utilizes Si-wafer direct bonding(SDB) and mechanical-chemical(M-C) local polishing to create a SOI structure with a high-quality, uniformly thin layer of single-crystal Si. The electrical and piezoresistive properties of the resultant thin SOI films have been investigated by SOI MOSFET`s and cantilever beams, and confirmed comparable to those of bulk Si. Two kinds of pressure transducers using a SOI structure have been proposed. The shifts in sensitivity and offset voltage of the implemented pressure transducers using interfacial SiO₂ films as the dielectrical isolation layer of piezoresistors were less than -0.2% and +0.15, respectively, in the temperature range from -20℃ to +350℃. In the case of pressure transducers using interfacial SiO₂ films as an etch-stop layer during the fabrication of thin Si membranes, the pressure sensitivity variation can be controlled to within a standard deviation of ±2.3% from wafer to wafer. From these results, the developed SDB process and the resultant SOI films will offer significant advantages in the fabrication of integrated microtransducers and circuits.

Epitaxially stacked Si/Al₂O₃/Si Structures as Sensor Materials

Chung, Gwiy-Sang,Nakamura, Tetsuro 경북대학교 센서기술연구소 1992 센서技術學術大會論文集 Vol.3 No.1

Si-Wafer Direct Bonding and Micromachining

Chung, Gwiy-Sang,Nakamura, Tetsuro 경북대학교 센서기술연구소 1992 센서技術學術大會論文集 Vol.3 No.1

Pressure Sensors Based on a SOI Structure

Chung, Gwiy-Sang,Nakamura, Tetsuro 경북대학교 센서기술연구소 1992 센서技術學術大會論文集 Vol.3 No.1

범용 multiple subjects바이오텔레미트리 CMOS IC의 제작

서희돈,中村哲郞,박종대,松本佳恒 경북대학교 센서기술연구소 1994 연차보고서 Vol.1994 No.-

본 연구는 5㎛ n-well CMOS 공정기술에 의해 제조된 다중생체 바이오텔레미트리 시스템의 제작과 그 동작특성을 기술하였다. 본 시스템은 8 개의 피측정체로부터 선택된 피측정체의 7 개의 생체신호를 연속적으로 체외로 전송 가능하다. FM 송신기와 센서인터페이스 회로를 제외한 체내삽입 시스템을 4×4㎟의 크기로 집적화 하였다. 이 IC를 사용하여 3×3×2.5㎠의 하이브리드 패키지로 내부시스템을 조립할 수 있다. 본 시스템의 주된 특징은 8개의 피측정체로부터 하나를 선택할 수 있고, 또한 선택된 피측정체의 생체신호를 연속측정 가능하고, 외부시스템의 커맨드신호와 선택신호 신호에 의해 체내 삽입된 전원의 ON/OFF가 가능하다. 본 시스템의 목적은 체내 삽입된 서로 다른 센서로부터 계측된 생체정보를 무선으로 전송 가능하여 외부기록계로 생체정보를 수신하는 것이다. 저소비전력은 체내시스템을 CMOS 회로로 구성하였고, 시스템이 사용되지 않을 때는 전원을 OFF 하였고, 또한 전원의 간헐적 동작으로 커맨드수신기 자체의 소비전력도 줄일 수 있다. 국내에서 개발되고 있는 각종센서를 본 시스템과 함께 삽입하면 압력, pH와 온도 등의 생체정보를 측정하여 전송 가능하다. This research presents a manufacture of the multiple subjects biotelemetry system using custom CMOS IC fabricated 5㎛ n-well process technology and proposes the principle operation of the multiple subjects telemetry. This system can transmit maximum 7-channel physiological signals simultaneously from a selected one among the 8 subjects. Implantable circuits of this system, except for the sensor interface circuits and a FM transmitter, are fabricated on a single chip with the size of 4×4㎟. It is possible to assemble the internal system in a hybrid package as small size 3×3×2.5㎠ by using this chip. Main features of this system are to select one of the 8 subjects and to enable continuous measurement of physiological signals, and to accomplish ON/OFF switching of an implanted battery by receiving subject selection signals and command signals from the external circuit. The object of this system is due to transmit physiological signal obtained from the several different implanted system, and to receive such information on external recorders. Low power consumption of internal system is acomplished by using CMOS circuits for the digital part and by disconnecting the power source of analog circuits when the system is not in use, and also achieved by adding a pulse powered circuit to the command receiver which concept involves intermittent getting of the power supply. This system used together with appropriate sensors is expected to be capable of measuring and transmitting such significant parameters as pressure, pH and temperature.

NOVEL PRESSURE SENSOR SUITABLE FOR ULTRA-STABLE HIGH-TEMPERATURE AND HIGH-RESOLUTION USING SOI TECHNOLOGY

정귀상,Shoji Kawahito,Makato Ishida,Tetsuro Nakamura,최세곤 대한전자공학회 1990 대한전자공학회 학술대회 Vol.1990 No.7

Rectal mobilization for laparoscopic pelvic lymphadenectomy of the lower paracervical pathway in patients with uterine cancer

( Iori Kisu ),( Hidetaka Nomura ),( Miho Iida ),( Kouji Banno ),( Tetsuro Shiraishi ),( Moito Iijima ),( Kayoko Nakamura ),( Kiyoko Matsuda ),( Nobumaru Hirao ) 대한산부인과학회 2021 Obstetrics & Gynecology Science Vol.64 No.6

Objective The pelvic lymphatic drainage system comprises the upper and lower paracervical pathways (LPPs). Lymph node dissection of the LPP, including the cardinal ligament, internal iliac, internal common iliac, and presacral lymph nodes, requires higher surgical skills because of the anatomical limitations of the pelvic cavity and the dissection of vessels while preserving the nerves in the pelvic floor. In this video, we demonstrate rectal mobilization for laparoscopic complete pelvic lymph node dissection of the LPP in patients with uterine cancer. Methods Rectal mobilization was performed before complete pelvic lymph node dissection of the LPP. The pararectal space was opened widely and the connective tissue between the presacral fascia and prehypogastric nerve fascia was dissected bilaterally, allowing the rectum to be pulled. Results This procedure created a wide-open space in the pelvic floor, allowing clear visualization of the nerves and lymph nodes of the LPP. Laparoscopic complete lymph node dissection of the LPP was performed in the open space while preserving the hypogastric and pelvic splanchnic nerves and isolating the extensive network of blood vessels in the pelvic cavity. Conclusion Rectal mobilization enabled the safe execution of laparoscopic complete pelvic lymph node dissection of the LPP in patients with uterine cancer.