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Cheng-Lin Huang,Chih-Huang Lai,Po-Hao Tsai,Yu-Lin Kuo,Jing-Cheng Lin,Chiapyng Lee 대한금속·재료학회 2014 ELECTRONIC MATERIALS LETTERS Vol.10 No.3
In this study, we investigated the thermal stability, wettability, adhesion and reliability of (Ti,Zr)Nx films used as the diffusion barrier between Cu and Si. (Ti,Zr)Nx films were prepared by DC reactive magnetron sputtering from a Ti-5 at. % Zr alloy target in N2/Ar gas mixtures. A minimum film resistivity of 59.3 μΩ cm was obtained at an N2/Ar flow ratio of 2.75, which corresponds to the near stoichiometric composition (N/(Ti,Zr) ratio ~0.95). The sheet resistance of Cu/(Ti,Zr)N0.95/Si was not significantly increased until annealing above 750°C, indicating good thermal stability. On the other hand, the adhesion energy between Cu and the (Ti,Zr)Nx film was reduced as the N/Ti ratio was increased. To obtain reliable performance on stress-induced-voiding (SIV) and electromigration (EM) tests, we proposed to use (Ti,Zr)/(Ti,Zr)Nx/(Ti,Zr) tri-layers. We suggest that the interfacial adhesion between barrier and Cu plays an important role in reliability. The proposed tri-layer structure may be a promising candidate for a barrier, as it exhibits excellent reliability without increasing resistance.
ANALYZING ISUAL SPECTROPHOTOMETER DATA USING A TWO-COLOR DIAGRAM METHOD
CHEN ALFRED BING-CHIH,CHIANG PO-SHIH,HUANG TIAN-HSIANG,KUO CHENG-LING,WANG SHI-CHUN,SU HAN-TZONG,HSU RUE-RoN,CHANG MING-HUI,CHANG YEOU-SHIN,LIU TIE-YUE,MENDE STEPHEN B.,FREY HARALD U.,FUKUNISHI HIROSH The Korean Astronomical Society 2005 Journal of The Korean Astronomical Society Vol.38 No.2
Transient luminous events (TLEs; sprites, elves, jets and etc.) are lightning-related optical flashes occurring above thunderstorms. Since the first discovery of sprites in 1989, scientists have learned a great deal about the morphological, spectroscopic and electromagnetic characteristics of TLEs through ground and spacecraft campaigns. However, most of the TLE studies were based on events recorded over US High Plains. To elucidate the possible biasing effects, space-borne observations are needed and have their merits. Imager of sprites and Upper Atmospheric Lightning (ISUAL) on the FORMOSAT-2 satellite is the first instrument to carry out a true global measurement of TLEs from a low- earth orbit. In this short paper, we apply a common astronomical data analysis technique, two-color diagram, on the ISUAL spectrophotometer (SP) data. By choosing appropriated bandpasses and converting the measured flux of TLEs into the unit of magnitude, two-color diagrams of TLEs can be constructed. We demonstrate that two-color diagrams, which were constructed from the narrow-band spectrophotometer data, can be used to classify different types of TLEs and trace their temporal evolution. The amount of reddening due to Earth's atmosphere can also be estimated from two-color diagrams assembled from the broad-band spectrophotometer data.