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전기문,신재수,임성규,박상현,강병구,윤진욱,윤주영,신용현,강상우,Jeon, Ki-Moon,Shin, Jae-Soo,Lim, Sung-Kyu,Park, Sang-Hyun,Kang, Byoung-Koo,Yune, Jin-Uk,Yun, Ju-Young,Shin, Yong-Hyeon,Kang, Sang-Woo 한국진공학회 2011 Applied Science and Convergence Technology Vol.20 No.2
본 연구에서는 새롭게 개발된 센서인 in-situ particle monitor (ISPM)와 기존센서의 기능을 업그레이드 한 센서인 self-plasma optical emission spectroscopy (SPOES)를 이용해 화학기상증착 진공공정을 진단하였다. 본 연구에서 사용된 증착공정 장비는 silane 가스를 이용한 silicon plasma enhanced chemical vapor deposition과 borophosphosilicate glass 증착장비이다. 두 장비의 증착 또는 클리닝 조건에서의 배출되는 오염입자와 배기가스를 개발된 센서를 이용해 공정상태를 실시간으로 진단하는 것과 개발된 센서의 센싱 능력을 검증하고자 하는 목적으로 연구가 진행되었다. 개발된 센서는 장비 배기구 설치되었으며, 공정압력, 유량, 플라즈마 파워 등의 공정변수 변화에 따른 오염입자 크기 및 분포와 배기 부산물의 변화를 측정하고, 측정 결과의 상호 연관성을 분석하였다. The diagnosis studies of the process of chemical vapor deposition were carried out by using in-situ particle monitor (ISPM) and self-plasma optical emission spectroscopy (SPOES). We used the two kinds of equipments such as the silicon plasma enhanced chemical vapor deposition system with silane gas and the borophosphosilicate glass depositon system for monitoring. Using two sensors, we tried to verify the diagnostic and in-situ sensing ability of by-product gases and contaminant particles at the deposition and cleaning steps. The processes were controlled as a function of precess temperature, operating pressure, plasma power, etc. and two sensors were installed at the exhaust line and contiguous with each other. the correlation of data (by-product species and particles) measured by sensors were also investigated.
신병우,현전기,Shin, Byung Woo,Hyun, Jeon Ki 대한자원환경지질학회 1985 자원환경지질 Vol.18 No.3
Building stones can be divided into two groups: raw stone and stone product. In Korea, they consist of granite, diorite, gabbro, andesite, tuff, slate and marble, of which granite is main product. The disribution area is approximately $31,753km^2$. The enterprises of building stone are about 1,500 at present. The granites for building stone are biotite granite, hornblende granite. granodiorite and porphyritic granite, of different colors (white, pink, grey, green and black). The compressive strength of granite ranges from 813 to $1,338kg/cm^2$, hardness from 78 to 101 and water absorption ratio from 0.09 to 0.40%. The weight reduction ratio of granite for 14 hours in aqua regia+$KMnO_4$solution is 0.3~4.5wt.%. There are eighty granite quarries in Korea. Marbles can also be extensively used for building but only a few mines are operated at present.
Byung Woo Shin(申柄雨),Jeon Ki Hyun(玄全基) 대한자원환경지질학회 1985 자원환경지질 Vol.18 No.3
Building stones can be divided into two groups: raw stone and stone product. In Korea, they consist of granite, diorite, gabbro, andesite, tuff, slate and marble, of which granite is main product The disribution area is approximately 31,753㎢. The enterprises of building stone are about 1,500 at present. The granites for building stone are biotite granite, hornblende granite, granodiorite and porphyritic granite, of different colors (white, pink, grey, green and black). The compressive strength of granite ranges from 813 to 1,338kg/㎠, hardness from 78 to 101 and water absorption ratio from 0.09 to 0.40%. The weight reduction ratio of granite for 14 hours in aqua regia+KMnO₄ solution is 0.3~4.5wt. %. There are eighty granite quarries in Korea. Marbles can also be extensively used for building but only a few mines are operated at present.