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CMOS Compatible Fabrication Technique for Nano-Transistors by Conventional Optical Lithography
Horst, C.,Kallis, K.T.,Horstmann, J.T.,Fiedler, H.L. The Institute of Electronics and Information Engin 2004 Journal of semiconductor technology and science Vol.4 No.1
The trend of decreasing the minimal structure sizes in microelectronics is still being continued. Therefore in its roadmap the Semiconductor Industries Association predicts a printed minimum MOS-transistor channel length of 10 nm for the year 2018. Although the resolution of optical lithography still dramatically increases, there are known and proved solutions for structure sizes significantly below 50 nm up to now. In this work a new method for the fabrication of extremely small MOS-transistors with a channel length and width below 50 nm with low demands to the used lithography will be explained. It's a further development of our deposition and etchback technique which was used in earlier research to produce transistors with very small channel lengths down to 30 nm, with a scaling of the transistor's width. The used technique is proved in a first charge of MOS-transistors with a channel area of W=200 nm and L=80 nm. The full CMOS compatible technique is easily transferable to almost any other technology line and results in an excellent homogeneity and reproducibility of the generated structure size. The electrical characteristics of such small transistor will be analyzed and the ultimate limits of the technique will be discussed.
Design of Long-Stator Linear Motor Drive for RailCab Test Track
Horst Grotstollen 전력전자학회 2004 ICPE(ISPE)논문집 Vol.- No.-
The basic equations of a doubly-fed long-stator linear motor for a shuttle-based railway system are established. They show which degrees of freedom exist for controlling the motor. The ratio of stator and rotor current proves to be an important parameter which<br/> determines the design of motor, converter and mechanics.
Horst Baier,Leri Datashvili 한국항공우주학회 2011 International Journal of Aeronautical and Space Sc Vol.12 No.3
Active and shape morphing aerospace structures are discussed with a focus on activities aimed at practical implementation. In active structures applications range from dynamic load alleviation in aircraft and spacecraft up to static and dynamic shape control. In contrast, shape morphing means strong shape variation according to different mission status and needs, aiming to enhance functionality and performance over wide flight and mission regimes. The interaction of required flexible materials with the morphing structure and the actuating mechanisms is specifically addressed together with approaches in design and simulation.