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Applications of Plasma Modeling for Semiconductor Industry
Efremov, Alexandre The Korean Institute of Electrical and Electronic 2002 전기전자재료 Vol.15 No.9
Plasma processing plays a significant role in semiconductor devices technology. Development of new plasma systems, such as high-density plasma reactors, required development of plasma theory to understand a whole process mechanism and to be able to explain and to predict processing results. A most important task in this way is to establish interconnections between input process parameters (working gas, pressure flow rate input power density) and a various plasma subsystems (electron gas, volume and heterogeneous gas chemistry, transport), which are closely connected one with other. It will allow select optimal ways for processes optimizations.
Efremov, A.,Lee, J.,Kwon, K.H. Elsevier Sequoia 2017 THIN SOLID FILMS - Vol.629 No.-
This work discusses the plasma characteristics and chemistry in CF<SUB>4</SUB>+Ar, Cl<SUB>2</SUB>+Ar and HBr+Ar gas systems in a comparative scale under one and the same operating condition. The investigation was carried out using the combination of plasma diagnostics by Langmuir probes and 0-dimensional plasma modeling in the planar inductively coupled plasma reactor at constant gas pressure (1.33Pa), input power (800W) and bias power (300W), but with variable (0-80%) Ar fraction in a feed gas. The study was focused on the parameters influencing the kinetics of ion-assisted chemical reaction and thus, determining the output characteristics of the etching process (etching rate, anisotropy). These parameters are the fluxes of F, Cl or Br atoms, ion bombardment energy, ion energy flux and neutral/charged species ratio. The differences between CF<SUB>4</SUB>+Ar, Cl<SUB>2</SUB>+Ar and HBr+Ar plasmas which seem to be important for the correct choice of the working gas for the particular etched material were discussed and explained in the framework of formation-decay kinetics of neutral and charged species.
Mechanisms of $Cl_2$ Molecules Dissociation in a Gas Discharge Plasma in Mixtures with Ar, $O_2.N_2$
Efremov, A.M.,Kwon, Kwang-Ho The Institute of Electronics and Information Engin 2001 Journal of semiconductor technology and science Vol.1 No.4
The influence of argon, oxygen, and nitrogen admixtures on the dissociation of $Cl_2$ molecules in a glow discharge low-temperature plasma under the constant pressure conditions was investigated. For $Cl_2/Ar$ and $Cl_2/O_2$mixtures, the concentration of chlorine atoms was observed to be a practically constant at argon or oxygen concentrations up to 50%. This invariability is a most pro bably explained by relative increase in rate of $Cl_2$ direct electron impact dissociation due to the changes in electrophysical parameters of plasma such as EEDF, electron drift rate and mean energy. For all the considered mixtures, the contribution of stepwise dissociation involving active species from gas additives (metastable atoms and molecules, vibrationally excited molecules) was found to be negligible.
Efremov Sergey Mihailovich,Kozireva Victoria Sergeevna,Moroz Gleb Borisovich,Abubakirov Marat Nikolaevich,Shkoda Olga Sergeevna,Shilova Anna Nikolaevna,Yarmoshuk Sergey Valeriyevich,Zheravin Alexandr 대한마취통증의학회 2020 Korean Journal of Anesthesiology Vol.73 No.6
Background: The aim of this study was to test the hypothesis that the use of inhalational anesthesia leads to higher suppression of the cell-mediated immunity compared to total intravenous anesthesia in patients undergoing kidney cancer surgery under combined low thoracic epidural analgesia and general anesthesia. Methods: Patients were randomly allocated to either propofol-based (intravenous anesthetic) or sevoflurane-based (volatile anesthetic) anesthesia group with 10 patients in each group, along with epidural analgesia in both groups. Amounts of natural killer cells, total T lymphocytes, and T lymphocyte subpopulations in the blood samples collected from the patients before surgery, at the end of the surgery and postoperative days 1, 3, and 7, were determined by flow cytometric analysis. The natural killer (NK) cell count served as the primary endpoint of the study, whereas the total T lymphocyte count and cell counts for T lymphocyte subpopulations were used as the secondary endpoint. . Results: Our study showed that there were no significant differences in the amount of NK cells, total T lymphocytes, regulatory T cells, and T-helper cells, cytotoxic T lymphocytes, and their subpopulations between the propofol- and sevoflurane-based anesthesia groups when the anesthesia was administered in combination with epidural analgesia. Conclusions: The results of this pilot study did not support the hypothesis that the use of inhalational anesthesia leads to higher suppression of the cell-mediated immunity than that of total intravenous anesthesia in patients undergoing kidney cancer surgery under combined low thoracic epidural analgesia and general anesthesia.
Lateral Driving Envelope Protection Using Cascade Control
Denis Efremov,Yehor Zhyliaiev,Bohdan Kashel,Toma? Hani? 제어로봇시스템학회 2021 제어로봇시스템학회 국제학술대회 논문집 Vol.2021 No.10
The steer-by-wire technology opens a possibility to create new advanced driver assistant systems. This work proposes a control structure that keeps the lateral vehicle dynamics in predefined stability boundaries and prevents the dominant sliding motion. We intentionally employed a cascade control law design suited for embedded platforms, often with low computational capacity. The proposed control hierarchical architecture is heavily inspired by aerospace domain solution, the flight envelope protection algorithms, which are still used in modern civil aircraft. The vehicle lateral acceleration is selected as the control system reference signal, commanded by a driver. The controller tracks such reference signal while respecting the driving envelope and vehicle operation safety limits. Several driving experiments were conducted to evaluate the proposed control structure in the statistical sense. The comparison with solution based on model predictive control framework and baseline vehicle without any assistance system is presented. Performed experiments were evaluated based on objective vehicle performance, like lap time and a number of collisions, combined with a human driver’s subjective evaluation. Experiments clearly show the incoherence of results and biased of skilled drivers. The objectively better vehicle performance, faster lap time with fewer collisions, received a lower subjective evaluation from experienced drivers used to current driving style.
A.M.Efremov,Dong-PyoKim,Chang-IlKim 한국물리학회 2003 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.43 No.6
In this work, we carried out an investigation of the in uence of the Cl2/CF4 mixing ratio on both the plasma parameters and the volume densities of the neutral and the charged particles in an inductively coupled plasma system. The shift in the gas mixture content from pure Cl2 to CF4 was found to lead decrease in the electron and the ion densities but to an increase in the electron temperature. Although a stepwise dissociation did not contribute to the formation of Cl and F atoms, a change in the gas mixing ratio in uenced electron-impact dissociation and recombination kinetics. As a result, in a Cl2-rich plasma, a non-monotonic behavior of the Cl atom density is possible.
Figurative verbs in the Yakut language in comparision with the Mongolian
Nikolai N. Efremov,Vladimir D. Monastyrev 한국알타이학회 2019 알타이학보 Vol.0 No.29
Long-term areal contacts of Yakut ancestors with Mongolic-speaking tribes are embodied in the lexical system of the language, ideophones in particular. The picture of the world is represented in ideophones emotionally and expressively, therefore they are used to describe an object more lively and in detail. Yakut and Mongolian are very similar in abundance of lexical-semantic diversity of ideophones which define the national specific characteristics of the compared languages. The paper considers structural-semantic features of Yakut and Mongolian figurative verbs of visual action characterizing motion mostly related to human and animal appearance. Their common and characteristic features are clarified. Yakut ideophones in contrast to Mongolian are characterized by more specified lexical-grammatical meanings. They feature polysemy and various aspect and voice forms that sometimes build word forms with a lexicalized meaning. In Mongolian, the analyzed verbs can also be represented by aspect indicators, the forms of a single and multiple actions. Thus, these are aspect and voice forms that are the most productive derivational forms supplementing the body of ideophones. The received results may be used as basis for further comparative-contrastive studies of Altaic languages as well as a supplementary illustrative material for the Mongolian-Russian-Yakut Dictionary being currently compiled.