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리모트 프라즈마 전원용 하프 브리지 인버터의 운전 특성
김수석(S.S. Kim),원충연(C.Y. Won),최대규(D.K. Choi),최상돈(S.D. Choi) 전력전자학회 2003 전력전자학술대회 논문집 Vol.2003 No.7(2)
In this paper, a operation characteristics and analysis of the HB(half bridge) inverter for remote plasma system arc studied. the remote plasma system is cleaning system for the chemical vapor deposition (CVD) chamber in semiconductor processing. The remote plasma system is powered by the RF generator. The main power stage of the RF generator is used for the HB PWM inverter with an low pass filter in the secondary circuit of the transformer. The detailed mode analysis of HB inverter was described. The operation characteristics of Remote Plasma Source arc verified by simulation and experimental results.<br/>
RF 발생기용 고성능 능동 클램프 ZVS 플라이백 컨버터에 관한 연구
이우석(W.S.Lee),김준호(J.H.Kim),원충연(C.Y.Worn),최대규(D.K.Choi),최상돈(S.D.Choi),김수석(S.S.KIM) 전력전자학회 2001 전력전자학술대회 논문집 Vol.2001 No.7
This paper deals with the active clamp ZVS flyback converter for RF generator. The proposed converter has the characteristics of the low switching noise and high efficient regarding conventional flyback converter. To verify validity of the proposed converter, the 100kHz, 48V, 300W converter are simulation and experimental result. This converter will be apply to the discharge drive circuit for PDP(Plasma Display Panel) TV.
이정호(J.H.Lee),최대규(D.K.Choi),최상돈(S.D.Choi),최해영(H.Y.Choi),원충연(C.Y.Won),김수석(S.S.Kim) 전력전자학회 2003 전력전자학술대회 논문집 Vol.2003 No.7(1)
When ICP(Inductive Coupled Plasma) type etching and wafer manufacturing is being processed m semiconductor process, a noxious gas in PFC and CFC system is generated Gas cleaning dry scrubber is to remove This noxious gas. This paper describes a power source device, 2MHz switching frequency class 2kW RF Generator, used as a main power source of the gas cleaning dry scrubber. The power stage of DC/DC converter is consist of full bridge type converter with 100kHz switching frequency. Power amplifier is push pull type inverter with 2MHz switching frequency, and transmission line transformer The adequacy of the circuit type and the reliability of generating plasma In various load conditions are verified through 50Ω dummy load and chamber experiments result
최상돈,이재훈,강영욱,김영미 慶北大學校 師範大學 科學敎育硏究所 1998 科學敎育硏究誌 Vol.22 No.-
Two theories of magneto-optical transition in solids are compared. It is shown that the CFR theory looks more rigorous for interpreting the scattering mechanisms in solids, while the MWC theory seems to be more convenient in numerical calculation.
MWC SCHEME의 전자-PHONON계의 CYCLOTRON共鳴線함수
최상돈,이상인,김재숙 경북대학교 교육대학원 1985 논문집 Vol.17 No.-
전자-Phone계의 cyclotron공명흡수선의 모양에 관한 MWC공식을 유도하는 데 있어서 Green-Kubo형식과 사영연산자 방법을 사용하였다. 본 공식을 써서 InSb의 선폭을 계산하여 Summers등의 실험과 Lodder-Fujita공식을 사용한 이론치와 비교하였다. Cyclotron resonance lineshape function for electron-phonon systems in the MWC scheme is introduced on the basis of the Green-Kubo formalism and by using Argres-Sigel's projection operator technique. The formula is applied to an optical polaron system and the result is compared with other authors'.
2. Theory of Magnetoconductive Transport in Quasi Two-Dimensional Semiconductor Systems
Park, T.S.,Sohn, K.S.,Choi, S.D. 慶北大學校 物理化學硏究所 1983 硏究論文集 Vol.4 No.-
사영연산자의 방법을 써서 준2차원 반도체계의 자기도전 효과에 관한 이론을 소개하고 이론의 타당성을 조사했다. 이 이론에서 얻은 공명선의 꼴에 관한 공식이 닫겨진 형식으로 표시되는 점이 연결도형방법의 결과와 다르고, 그 공식이 공명조건에서 발산되지 않은것을 귀납적으로 확인했다. 이 이론에 부합되는 상호작용으로서는 Tzoar의 모형을 다소 수정하여 얻은 식이 더 타당하다는것을 아울러 밝혔다. A Theory of magnetoconductivity in quasi two-dimensional semiconductor system is introduced on the basis of the projection operator method, and the validity of the theory at the resonance peaks is also examined.
강영욱,이철환,이재훈,최상돈 경북대학교 과학교육연구소 1997 科學敎育硏究誌 Vol.21 No.-
Wave functions of an electron in a static magnetic field depend on the choice of vector potential, and thus are not unique. This non-uniqueness of the wave functions, however, does not affect any quantity having physical significance. This idea is applied to some magneto-optical conductivity theories, in order to confirm that the line-shape function is gauge invariant.