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실시간 플라즈마공정 모니터링을 위한 Self Plasma-Optical Emission Spectroscopy 성능 향상
조경재,홍상진 한국반도체디스플레이기술학회 2017 반도체디스플레이기술학회지 Vol.16 No.2
We reports improved monitoring performance of Self plasma-optical emission spectroscopy (SP-OES) by augmenting a by-pass tube to a conventional straight (or single) tube type self plasma reactor. SP-OES has been used as a tool for the monitoring of plasma chemistry indirectly in plasma process system. The benefits of SP-OES are low cost and easy installation, but some semiconductor industries who adopted commercialized SP-OES product experiencing less sensitivity and slow sensor response. OH out-gas chemistry monitoring was performed to have a direct comparison of a conventional single type tube and a by-pass type tube, and fluid dynamic simulation on the improved hardware design was also followed. It is observed faster pumping out of OH from the chamber in the by-pass type SP-OES.
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조경재,정준호,이재수,Cho Kyeng-Jai,Jeong Jun-Ho,Lee Jae-Su 한국정보통신학회 2004 한국정보통신학회논문지 Vol.8 No.7
최근 정보통신의 흐름은 사용자의 다양한 정보 욕구를 만족시키기 위한 통신 서비스의 개발에 주력하고 있다. 근거리망의 통신에 광송신 모듈은 850nm, 1310nm의 파장대역을 사용하며, 광원의 구조는 LD를 사용하였지만, 장파장 및 Gbps급에서는 데이터 처리 능력이 뛰어난 수직공진형 표면발광 레이저(Vertical Cavity Surface Emitting Laser : VCSEL)을 많이 사용한다. 본 연구에서는 기본적인 광특성을 분석한 후 GHz급 이상에서 동작이 가능하도록 광전송 모듈을 개발하고 펄스 패턴 발생구를 이용하여 2.5GHz, 3GHz에서의 전송 특성을 분석하였다. The recent trend of information communication is to focus on improving communication services in order to satisfy the customer's desire for various information. Optical transducers of Local Area Network use 850nm or 1310nm among wavelength ranges and LD as a light source. However, Vertical Cavity Surface Emitting Laser(VCSEL) which is very excellent to deal with data processing is used at long wavelength or Gbps. In this paper, after basic optical characteristics were introduced a optical transmission module was developed to be operated over GHz and its transmission characteristics were analyzed at 2.5GHz and 3GHz with pulse pattern generator.
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조경재,차인수,이권현 전력전자학회 1999 전력전자학회 논문지 Vol.4 No.5
We introduce the systematization design method using similarity theory which is profitable in the c compatability and standardization of the developed products and the reduction of construction time and price to d develop and design a machine equipment. Systematization design method is to select the standard model for d designing and developing from the large machinery to the super precision one and then to induce the c characteristic of machines step by step in advance in case of miniaturizing and making largelongleftarrowscale. With this m method, we extract the peculiar characteristics through the close analysis on the physical and ttx:hnical part a and predict the characteristic experiment for the magnitude we desire by an머ogical mathematical analysis. At l last, we will get the design sample the users demand with the verification of the data on optimum design p previously. In this paper, we could predict the characteristic of the product the users rC'Quire in advance with the d design method applying similarity theor${\gamma}$ and suggested the design method which could meet the various r requirements the users want. Also, it is shown that the standardization design by the similarity theory is a available as comparing the characteristic values expc'Cted through the experiment of the actual actuator with t the theoretical character data of similarity theoη after selecting the linear actuator as a model. 기계기구의 설계나 개발시 개발제품의 표준화 및 호환성, 공기의 단축, 가격저하 등의 잇점을 갖는 유사이론을 적용한 계열화 설계기법을 소개하고자 한다. 계열화 설계기법은 대형기기에서부터 초정밀 기기 등에 대한 설계나 개발시 표본 모델을 선정하고 단계적으로 소형화나 대형화 시킬 때 미리 기기의 특성을 유추할 수 있는 설계기법으로서 기기의 특성을 물리적이고 기술적인 부분의 면밀한 분석을 통해서 고유한 특징을 추출하고 이에 대한 유추론적 수학의 해석으로 추구하고자 하는 크기에 대한 특성을 예측할 수 있고 최적 설계상의 데이터를 사전에 검증하므로서 수요자가 요구하는 설계 표본을 이끌어 낼 수 있다. 본 논문에서는 설계자나 개발자가 수요자가 요구하는 제품에 대해서 유사이론을 적용한 설계방법으로 사전에 제품의 특성을 예측하고 수요자와의 의견 조율이 가능한 설계기법을 제시하였으며 리니어 액츄에이터를 모델로 선정하여 유사성 이론에 의한 이론에 의한 이론적 특성 데이터와 실행 액츄에이터의 실험을 통하여 예측하였던 특성값을 비교 검토 하므로서 유사이론에 의한 표준화 설계가 가능함을 보여주고 있다.
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Carbon Dioxide Angiography: Scientific Principles and Practice
조경재 대한혈관외과학회 2015 Vascular Specialist International Vol.31 No.3
Carbon dioxide (CO2) is a colorless, odorless gas which occurs naturally in the atmosphere and human body. With the advent of digital subtraction angiography, the gas has been used as a safe and useful alternative contrast agent in both arteriography and venography. Because of its lack of renal toxicity and allergic potential, CO2 is a preferred contrast agent in patients with renal failure or contrast allergy, and particularly in patients who require large volumes of contrast medium for complex endovascular procedures. Understanding of the unique physical properties of CO2 (high solubility, low viscosity, buoyancy, and compressibility) is essential in obtaining a successful CO2 angiogram and in guiding endovascular intervention. Unlike iodinated contrast material, CO2 displaces the blood and produces a negativecontrast for digital subtraction imaging. Indications for use of CO2 as a contrast agent include: aortography and runoff, detection of bleeding, renal transplant arteriography, portal vein visualization with wedged hepatic venous injection, venography, arterial and venous interventions, and endovascular aneurysm repair. CO2 should not be used in the thoracic aorta, the coronary artery, and cerebral circulation. Exploitation of CO2 properties, avoidance of air contamination and facile catheterization technique are important to the safe and effective performance of CO2 angiography and CO2-guided endovascular intervention.
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전력보상장치를 이용한 독립형 복합발전시스템에 관한 연구
조경재 전남도립대학교 2000 전남도립대학교 논문집 Vol.4 No.-
The developments of the solar and the wind power energy are necessary since the future alternative energies that have no pollution and no limitation are restricted. Currently power generation system of MW scale has been developed, but it still has a few faults with the weather condition. In order to solve these existing problems, combined generation system of photovoltaic(400W) and wind power generation system(400W) was suggested. It combines wind power and solar energy to have the supporting effect from each other. However, since even combined generation system cannot always generate stable output with ever-changing weather condition, power compensation device that uses elastic energy of spiral spring to combined generation system was also added for the present study. In an experiment, when output of system gets lower than 12V(charging voltage), power was continuously supplied to load through the inverter by charging energy obtained from generating rotary energy of spiral spring operates in small scale generator.
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