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나노스템프 위치제어용 중공형 압전액추에이터에 관한 연구
박중호(J. H. Park),이재종(J. J. Lee),최기봉(K. B. Choi),윤소남(S. N. Yun) 한국동력기계공학회 2009 한국동력기계공학회 학술대회 논문집 Vol.2009 No.11
In recent years, nanoimprinting lithography has been actively investigated, which can replicate nano-patterned master stamp into wafer and so on. Miniaturized precise actuators to control stamp displacement of doens of um in limited space are required for driving nanoscale stamp. In this study, basic characteristics on displacement and generation force of the prototype of hollow piezoelectric actuator developed for positioning stamp are experimentally investigated.