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스퍼터를 이용한 마이크로 니들의 니켈 코팅에 관한 연구
신홍규(Hong Gue Shin),조창연(Chang Yon Jo),김병희(Byeong Hee Kim) 한국생산제조학회 2006 한국공작기계학회 춘계학술대회논문집 Vol.2006 No.-
In this paper, DC magnetron sputter process for the deposition of conductive nickel coating on ultra-high aspect ratio(UHAR) micro probe pins for wafer inspection is described. Magnetron sputtering is the most widely used method for vacuum thin film deposition and serves over 90% of the market for sputter deposition. However, it has been known that it is hard to coat the UHAR micro structures because of its directional characteristics. Generally, UHAR coating results show lacks of uniformityand strength. In order to overcome these problems, it was suggested that the introduction of the tilting and rotating stage would likely make not only the uniformity and the strength of coating but also the easiness of post-soldering increase. Through various experiments and analyses, optimal coating conditions, such as a space between pins, a concentration of argon gas, a vacuum pressure and a current of DC targets could be obtained. Under optimal conditions, up to 1,200 probe pins with 150㎛ diameter, 7.3㎜ length can be cleaned and coated in about 20 minutes almost without any defect. Consequently, we proved that, compared with a wet coating, a dry coated probe pin will likely have a better performance, cost-effectiveness and yield.
스퍼터를 이용한 마이크로 니들의 니켈 코팅에 관한 연구
신홍규(Hong Gue Shin),조창연(Chang Yon Jo),김병희(Byeong Hee Kim) 한국생산제조학회 2006 한국생산제조시스템학회 학술발표대회 논문집 Vol.2006 No.5
In this paper, DC magnetron sputter process for the deposition of conductive nickel coating on ultra-high aspect ratio(UHAR) micro probe pins for wafer inspection is described. Magnetron sputtering is the most widely used method for vacuum thin film deposition and serves over 90% of the market for sputter deposition. However, it has been known that it is hard to coat the UHAR micro structures because of its directional characteristics. Generally, UHAR coating results show lacks of uniformityand strength. In order to overcome these problems, it was suggested that the introduction of the tilting and rotating stage would likely make not only the uniformity and the strength of coating but also the easiness of post-soldering increase. Through various experiments and analyses, optimal coating conditions, such as a space between pins, a concentration of argon gas, a vacuum pressure and a current of DC targets could be obtained. Under optimal conditions, up to 1,200 probe pins with 150㎛ diameter, 7.3㎜ length can be cleaned and coated in about 20 minutes almost without any defect. Consequently, we proved that, compared with a wet coating, a dry coated probe pin will likely have a better performance, cost-effectiveness and yield.
신홍규(Hong-Gue Shin),이영수(Young-Soo Lee),남권선(Kwon-Sun Nam),김병희(Byeong-Hee Kim) 한국생산제조학회 2004 한국생산제조시스템학회 학술발표대회 논문집 Vol.2004 No.10
The bio-micro pin has been usually used for the biochemistry analysis. The manufacturing capability of the micro-pin and the their array with the effective and low-cost way is very important and it gives great economical benefits to developers. The micro-pin is composed of the sample channel for holding the liquid with the fixed volume, the flat tip which determines the printing quality and the pin head for preventing the rotation of the pin in the holder. In this study, we have manufactured newly designed micro-pins by the wire-EDM process with special jigs, and analyzed liquid holding and printing characteristics with respect to the variation of the shape and the tip size of the micro-pin.
양극산화된 알루미늄과 마이크로 인덴테이션을 이용한 3 차원 마이크로-나노 하이브리드 패턴 제작
권종태(Jong Tae Kwon),신홍규(Hong Gue Shin),서영호(Young Ho Seo),김병희(Byeong Hee Kim) 대한기계학회 2007 大韓機械學會論文集A Vol.31 No.12
A simple method for the fabrication of 3D micro-nano hybrid patterns was presented. In conventional fabrication methods of the micro-nano hybrid patterns, micro-patterns were firstly fabricated and then nanopatterns were formatted on the micro-patterns. Moreover, these micro-nano hybrid patterns could be fabricated on the flat substrate. In this paper, we suggested the fabrication method of 3D micro-nano hybrid patterns using micro-indentation on the anodized aluminum substrate. Since diameter of the hemispherical nano-pattern can be controlled by electrolyte and applied voltage in the anodizing process, we can easily fabricated nano-patterns of diameter of 10㎚ to 300㎚. Nano-patterns were firstly formatted on the aluminum substrate, and then micro-patterns were fabricated by deforming the nano-patterned aluminum substrate. Hemispherical nano-patterns of diameter of 150㎚ were fabricated by anodizing process, and then micro-pyramid patterns of the side-length of 50㎛ were formatted on the nano-patterns using microindentation. Finally we successfully replicated 3D micro-nano hybrid patterns by hot-embossing process. 3D micro-nano hybrid patterns can be applied to nano-photonic device and nano-biochip application.
알루미늄 양극산화공정으로 제작된 나노홀의 형상에 따른 접촉각 변화 특성
양희철(Hee Cheol Yong),박용민(Yong Min Park),신홍규(Hong Gue Shin),서영호(Young Ho Seo),김병희(Byeong Hee Kim) 대한기계학회 2010 대한기계학회 춘추학술대회 Vol.2010 No.5
This paper presented the change of the contact angle for the different diameters of the nanohole arrays which were fabricated by anodizing process of the aluminum. Nano-patterned surfaces had generally hydrophobic or super-hydrophobic characteristics known as lotus effect. According to the several reports, nano-porous anodic aluminum oxide(AAO) was known as hydrophilic material. In this work, we fabricated different diameters of nanohole arrarys, while we fixed the inter-distance between nanoholes and the depth of the nanoholes. Inter-distance and depth of nanoholes were fixed as 207±14㎚ and 270±30㎚, respectively. Diameters of the nanoholes were controlled from 36nm to 200nm. AAOs with diameters of 36.3㎚ ~ 128.8㎚ showed hydrophilic characteristics, while AAOs with diameters of 147.5㎚ ~ 181.1 ㎚ showed hydrophobic characteristics. As diameter of nanohole closing with 200㎚, that is, as wall of nanohole eliminating, AAO showed hydrophilic characteristics again.
신홍규,이영수,남권선,김병희 한국공작기계학회 2004 한국공작기계학회 추계학술대회논문집 Vol.2004 No.-
The bio-micro pin has been usually used for the biochemistry analysis. The manufacturing capability of the micro-pin and the their array with the effective and low-cost way is very important and it gives great economical benefits to developers. The micro-pin is composed of the sample channel for holding the liquid with the fixed volume, the flat tip which determines the printing quality and the pin head for preventing the rotation of the pin in the holder. In this study, we have manufactured newly designed micro-pins by the wire-EDM process with special jigs, and analyzed liquid holding and printing characteristics with respect to the variation of the shape and the tip size of the micro-pin.