http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
손해성,차상호,이원기,김동균,윤효진,김명선,김부득,김영호,이재우,김정식,김덕배,김재현,이종찬 한국고분자학회 2011 Macromolecular Research Vol.19 No.7
ArF photoresist polymers were prepared via reversible addition-fragmentation chain transfer (RAFT)polymerization and free radical polymerization (FRP). Three methacrylates with lithographic functionalities including 2-ethyl-2-adamantyl methacrylate (EAdMA), α-gamma-butyrolactone methacrylate (GBLMA), and 3-hydroxy-1-adamantyl methacrylate (HAdMA), were used as monomer components and 2-cyanoprop-2-yl-1-dithionaphthalate (CPDN) was used as the chain transfer agent (CTA). In both polymerizations, the order of monomer reactivity was GBLMA>HAdMA>>EAdMA. This caused a composition gradient in RAFT polymerization as well as composition inhomogeneity in FRP. The polymers prepared by RAFT polymerization had lower molecular weight distributions and more uniform compositions. The improvement in molecular weight distribution and composition uniformity of the polymers prepared by RAFT polymerization should be beneficial for the ArF lithography process.
Preparation of well-defined acid-cleavable branched polymers composed of methacrylates and acrylates
손해성,김동균,이예리,차상호,이종찬 한국공업화학회 2015 Journal of Industrial and Engineering Chemistry Vol.21 No.1
Acid-cleavable branched polymers composed of a methacrylate and two acrylates were preparedthrough reversible addition-fragmentation chain transfer (RAFT) polymerization. The molecular weightof primary chains and the degree of branching of the polymers were controlled by the feed ratio ofmonomer/chain transfer agent (CTA) and brancher/CTA, respectively. Glass transition temperatures ofthe polymers increased as the degree of branching grew due to an increase in molecular weight. Whenthe branched polymers were hydrolyzed, molecular weight and polydispersity index value were similarto those of linear polymer prepared by RAFT polymerization with the samemolar feed ratio of monomer/CTA.